Single-step etch mask for 3D monolithic nanostructures

Diana Grishina; Cornelis A.M. Harteveld; L.A. Woldering; Willem L. Vos

Single-step etch mask for 3D monolithic nanostructures

Diana Grishina, Cornelis A.M. Harteveld, L.A. Woldering, Willem L. Vos

Complex Photonic Systems

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 19 Jul 2016
Event	11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016 - Fudan University , Changhai, China Duration: 11 May 2016 → 15 May 2016 Conference number: 11

Conference

Conference	11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016
Abbreviated title	PECS-XI
Country/Territory	China
City	Changhai
Period	11/05/16 → 15/05/16

Keywords

METIS-318268

Cite this

@conference{62f0469921f24ae0b3e8bdaf2a53b8f6,

title = "Single-step etch mask for 3D monolithic nanostructures",

keywords = "METIS-318268",

author = "Diana Grishina and Harteveld, {Cornelis A.M.} and L.A. Woldering and Vos, {Willem L.}",

year = "2016",

month = jul,

day = "19",

language = "English",

pages = "--",

note = "11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016, PECS-XI ; Conference date: 11-05-2016 Through 15-05-2016",

}

TY - CONF

T1 - Single-step etch mask for 3D monolithic nanostructures

AU - Grishina, Diana

AU - Harteveld, Cornelis A.M.

AU - Woldering, L.A.

AU - Vos, Willem L.

N1 - Conference code: 11

PY - 2016/7/19

Y1 - 2016/7/19

KW - METIS-318268

M3 - Poster

SP - -

T2 - 11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016

Y2 - 11 May 2016 through 15 May 2016

ER -