Single-step etch mask for 3D monolithic nanostructures

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 19 Jul 2016
Event11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016 - Fudan University , Changhai, China
Duration: 11 May 201615 May 2016
Conference number: 11

Conference

Conference11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016
Abbreviated titlePECS-XI
CountryChina
CityChanghai
Period11/05/1615/05/16

Keywords

  • METIS-318268

Cite this

Grishina, D., Harteveld, C. A. M., Woldering, L. A., & Vos, W. L. (2016). Single-step etch mask for 3D monolithic nanostructures. -. Poster session presented at 11th International Symposium on Photonic and Electromagnetic Crystal Structures 2016, Changhai, China.