SiON-technology for integrated optical sensors

Paul Lambeck, Kerstin Worhoff

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)


    Silicon oxynitride (SiON)- technology has been widely accepted for realizing integrated optical devices for application in optical telecommunication. Some of the severe requirements put in this field to devices and hence to technology are more relaxed in sensing applications, but other ones pop up in this area. These differences are explained from the general requirements put on the performance of integrated optical sensors performance and they are analyzed with respect to their consequences for applying SiON technology. Data about the technology are given. Application of the technology is illustrated on some chemo-optical sensors, a Mach-Zehnder interferometer, a polarimeter and a bend sensor, which have been developed in the MESA+-institute.
    Original languageUndefined
    Title of host publicationProceedings of SPIE
    EditorsGiancarlo C. Righini
    ISBN (Print)0819447390
    Publication statusPublished - 28 Oct 2002
    EventIntegrated Optical Devices: Fabrication and Testing, Brugge, Belgium: Proceedings of SPIE -
    Duration: 28 Oct 20021 Nov 2002

    Publication series

    NameProceedings of SPIE
    ISSN (Print)0277-786X


    ConferenceIntegrated Optical Devices: Fabrication and Testing, Brugge, Belgium


    • METIS-208284
    • IR-97869

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