Si1-xGex island formation by post-growth anneal on supercritical layers grown by RPCVD

K. Grimm, L. Vescan, L.K. Nanver, C.C.G. Visser, H. Lüth

Research output: Contribution to journalArticleAcademicpeer-review

Fingerprint

Dive into the research topics of 'Si<sub>1-x</sub>Ge<sub>x</sub> island formation by post-growth anneal on supercritical layers grown by RPCVD'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry

Physics & Astronomy