A silicon six-axis force–torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive read-out is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N mm of maximum torque around each axis.
- Force sensor
Brookhuis, R. A., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2014). Six-axis force-torque sensor with a large range for biomechanical applications. Journal of micromechanics and microengineering, 24(3), 1-10. https://doi.org/10.1088/0960-1317/24/3/035015