Abstract
A silicon six-axis force–torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive read-out is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N mm of maximum torque around each axis.
Original language | Undefined |
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Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Journal of micromechanics and microengineering |
Volume | 24 |
Issue number | 3 |
DOIs | |
Publication status | Published - 28 Feb 2014 |
Keywords
- EWI-24588
- IR-89831
- METIS-304027
- Force sensor