Smart Multilayer Interactive optics for Lithography at EUV wavelengths

Research output: Other contributionOther research output

Original languageEnglish
Place of PublicationDelft
Publication statusPublished - 2011

Keywords

  • METIS-304939

Cite this

@misc{cbfc6920aa11462db0291be1b7b68768,
title = "Smart Multilayer Interactive optics for Lithography at EUV wavelengths",
keywords = "METIS-304939",
author = "Muharrem Bayraktar and {van Goor}, F.A. and W. Wessels and Rijnders, {Augustinus J.H.M.} and Gertjan Koster and Lee, {Christopher James} and Frederik Bijkerk",
year = "2011",
language = "English",
type = "Other",

}

TY - GEN

T1 - Smart Multilayer Interactive optics for Lithography at EUV wavelengths

AU - Bayraktar, Muharrem

AU - van Goor, F.A.

AU - Wessels, W.

AU - Rijnders, Augustinus J.H.M.

AU - Koster, Gertjan

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2011

Y1 - 2011

KW - METIS-304939

M3 - Other contribution

CY - Delft

ER -