| Original language | English |
|---|---|
| Place of Publication | Delft |
| Publication status | Published - 2011 |
Keywords
- METIS-304939
Smart Multilayer Interactive optics for Lithography at EUV wavelengths
F.A. van Goor, W. Wessels, Augustinus J.H.M. Rijnders, Gertjan Koster, Christopher James Lee, Frederik Bijkerk
Research output: Other contribution › Other research output