Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 30 Oct 2013
Event4th Annual Meeting on Smart Optics Systems 2013 - Delft, Netherlands
Duration: 30 Oct 201330 Oct 2013
Conference number: 4

Conference

Conference4th Annual Meeting on Smart Optics Systems 2013
CountryNetherlands
CityDelft
Period30/10/1330/10/13

Keywords

  • METIS-298549

Cite this

Bayraktar, M., Chopra, A., Wessels, W. A., van Goor, F. A., Rijnders, A. J. H. M., & Bijkerk, F. (2013). Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths. -. Poster session presented at 4th Annual Meeting on Smart Optics Systems 2013, Delft, Netherlands.
Bayraktar, Muharrem ; Chopra, A. ; Wessels, W.A. ; van Goor, F.A. ; Rijnders, Augustinus J.H.M. ; Bijkerk, Frederik. / Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths. Poster session presented at 4th Annual Meeting on Smart Optics Systems 2013, Delft, Netherlands.
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title = "Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths",
keywords = "METIS-298549",
author = "Muharrem Bayraktar and A. Chopra and W.A. Wessels and {van Goor}, F.A. and Rijnders, {Augustinus J.H.M.} and Frederik Bijkerk",
year = "2013",
month = "10",
day = "30",
language = "English",
pages = "--",
note = "4th Annual Meeting on Smart Optics Systems 2013 ; Conference date: 30-10-2013 Through 30-10-2013",

}

Bayraktar, M, Chopra, A, Wessels, WA, van Goor, FA, Rijnders, AJHM & Bijkerk, F 2013, 'Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths' 4th Annual Meeting on Smart Optics Systems 2013, Delft, Netherlands, 30/10/13 - 30/10/13, pp. -.

Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths. / Bayraktar, Muharrem; Chopra, A.; Wessels, W.A.; van Goor, F.A.; Rijnders, Augustinus J.H.M.; Bijkerk, Frederik.

2013. - Poster session presented at 4th Annual Meeting on Smart Optics Systems 2013, Delft, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

AU - Bayraktar, Muharrem

AU - Chopra, A.

AU - Wessels, W.A.

AU - van Goor, F.A.

AU - Rijnders, Augustinus J.H.M.

AU - Bijkerk, Frederik

PY - 2013/10/30

Y1 - 2013/10/30

KW - METIS-298549

M3 - Poster

SP - -

ER -

Bayraktar M, Chopra A, Wessels WA, van Goor FA, Rijnders AJHM, Bijkerk F. Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths. 2013. Poster session presented at 4th Annual Meeting on Smart Optics Systems 2013, Delft, Netherlands.