Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Muharrem Bayraktar, A. Chopra, W.A. Wessels, F.A. van Goor, Augustinus J.H.M. Rijnders, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 30 Oct 2013
Event4th Annual Meeting on Smart Optics Systems 2013 - Delft, Netherlands
Duration: 30 Oct 201330 Oct 2013
Conference number: 4

Conference

Conference4th Annual Meeting on Smart Optics Systems 2013
CountryNetherlands
CityDelft
Period30/10/1330/10/13

Keywords

  • METIS-298549

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