Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 30 Oct 2013
Event	4th Annual Meeting on Smart Optics Systems 2013 - Delft, Netherlands Duration: 30 Oct 2013 → 30 Oct 2013 Conference number: 4

Conference	4th Annual Meeting on Smart Optics Systems 2013
Country/Territory	Netherlands
City	Delft
Period	30/10/13 → 30/10/13

Keywords

@conference{ab5d8006367f46cd98bb48585cd68ecf,

title = "Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths",

keywords = "METIS-298549",

author = "Muharrem Bayraktar and A. Chopra and W.A. Wessels and \{van Goor\}, F.A. and Rijnders, \{Augustinus J.H.M.\} and Frederik Bijkerk",

year = "2013",

month = oct,

day = "30",

language = "English",

pages = "--",

note = "4th Annual Meeting on Smart Optics Systems 2013 ; Conference date: 30-10-2013 Through 30-10-2013",

}

TY - CONF

T1 - Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

AU - Bayraktar, Muharrem

AU - Chopra, A.

AU - Wessels, W.A.

AU - van Goor, F.A.

AU - Rijnders, Augustinus J.H.M.

AU - Bijkerk, Frederik

N1 - Conference code: 4

PY - 2013/10/30

Y1 - 2013/10/30

KW - METIS-298549

M3 - Poster

SP - -

T2 - 4th Annual Meeting on Smart Optics Systems 2013

Y2 - 30 October 2013 through 30 October 2013

ER -