Smart multilayer interactive optics for lithography at extreme UV wavelengths

Oleksandr Antonov

Research output: ThesisPd Eng Thesis

28 Downloads (Pure)
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey , Co-Supervisor
Award date27 Jun 2017
Place of PublicationEnschede
Publisher
Publication statusPublished - 27 Jun 2017

Cite this

Antonov, O. (2017). Smart multilayer interactive optics for lithography at extreme UV wavelengths. Enschede: University of Twente.