Smart multilayer interactive optics for lithography at extreme UV wavelengths

Research output: Thesis › EngD Thesis › Academic

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Original language	English
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Yakshin, Andrey, Co-Supervisor
Award date	27 Jun 2017
Place of Publication	Enschede
Publisher	University of Twente
Publication status	Published - 27 Jun 2017

Access to Document

@phdthesis{f5d458ad597a4a49b08d18ff875c6317,

title = "Smart multilayer interactive optics for lithography at extreme UV wavelengths",

author = "Oleksandr Antonov",

year = "2017",

month = jun,

day = "27",

language = "English",

publisher = "University of Twente",

address = "Netherlands",

type = "EngD Thesis",

school = "University of Twente",

}