Soft-lithographic patterning of functional oxide and composite materials

This thesis gives an overview of the progress made in recent years in the development of low-cost parallel patterning techniques for ceramic materials, silica, and organic-inorganic silsesquioxane-based hybrids from wet-chemical solutions and suspensions on the micrometer and nanometer scale. The emphasis of the discussion is placed on the application of soft- lithographic methods. In general, molding-based patterning approaches and surface modification-based patterning approaches can be distinguished. Lateral resolutions well below 100 nm have been accomplished with some of these methods, but the fabrication of high-aspect ratio patterns remains a challenge.