Soft-lithographic patterning of functional oxide and composite materials

Sajid Khan

Research output: ThesisPhD Thesis - Research UT, graduation UT

115 Downloads (Pure)

Abstract

This thesis gives an overview of the progress made in recent years in the development of low-cost parallel patterning techniques for ceramic materials, silica, and organic-inorganic silsesquioxane-based hybrids from wet-chemical solutions and suspensions on the micrometer and nanometer scale. The emphasis of the discussion is placed on the application of soft- lithographic methods. In general, molding-based patterning approaches and surface modification-based patterning approaches can be distinguished. Lateral resolutions well below 100 nm have been accomplished with some of these methods, but the fabrication of high-aspect ratio patterns remains a challenge.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Blank, D.H.A., Supervisor
  • ten Elshof, Johan Evert, Advisor
Award date30 Jun 2010
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-3054-5
DOIs
Publication statusPublished - 30 Jun 2010

Keywords

  • METIS-269539
  • IR-71950

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