Soft lithographic stamp with a chemically patterned surface

M.M.J. Decre (Inventor), M. Blees (Inventor), P.P.J. van Eerd (Inventor), R.J.M. Schroeders (Inventor), D. Burdinski (Inventor), R.B.A. Sharpe (Inventor), Jurriaan Huskens (Inventor)

Research output: Patent

Original languageUndefined
Patent numberWO 2006/003592 A2
Priority date12/01/06
Publication statusSubmitted - 12 Jan 2006

Keywords

  • METIS-236303

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