Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects

Vitaly Krasnov; Igor Makhotkin; Jeroen E. Scheerder; Lars Loetgering; Victor Soltwisch; Paul A.W. van der Heide; Claudia Fleischmann

doi:10.1364/OE.535314

Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects

Vitaly Krasnov^*
, Igor Makhotkin
, Jeroen E. Scheerder
, Lars Loetgering
, Victor Soltwisch
, Paul A.W. van der Heide
, Claudia Fleischmann

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

4 Citations (Scopus)

5 Downloads (Pure)

Abstract

The results of a soft X-ray chemically sensitive ptychographic imaging of non-planar nanoscale 3D objects - atom probe tomography tips, with resolution down to 12 nm at 800 eV using scanning X-ray microscope at the electron storage ring BESSY II are presented. We validate that this approach can be used to determine the tip (emitter) shape, and to resolve inner nano-scale structures as relevant for semiconductor applications and even for quantitative chemical composition analysis. Imaging of buried interfaces with below 30 nm resolution is demonstrated. This work might pave the way for contactless, ptychographic in-situ characterization of APT tips with tabletop coherent EUV sources.

Original language	English
Pages (from-to)	43788-43804
Number of pages	17
Journal	Optics express
Volume	32
Issue number	25
DOIs	https://doi.org/10.1364/OE.535314
Publication status	Published - 2 Dec 2024

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@article{90b6bb0a695046098362e34d74fa3557,

title = "Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects",

abstract = "The results of a soft X-ray chemically sensitive ptychographic imaging of non-planar nanoscale 3D objects - atom probe tomography tips, with resolution down to 12 nm at 800 eV using scanning X-ray microscope at the electron storage ring BESSY II are presented. We validate that this approach can be used to determine the tip (emitter) shape, and to resolve inner nano-scale structures as relevant for semiconductor applications and even for quantitative chemical composition analysis. Imaging of buried interfaces with below 30 nm resolution is demonstrated. This work might pave the way for contactless, ptychographic in-situ characterization of APT tips with tabletop coherent EUV sources.",

author = "Vitaly Krasnov and Igor Makhotkin and Scheerder, \{Jeroen E.\} and Lars Loetgering and Victor Soltwisch and \{van der Heide\}, \{Paul A.W.\} and Claudia Fleischmann",

note = "Publisher Copyright: {\textcopyright} 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.",

year = "2024",

month = dec,

day = "2",

doi = "10.1364/OE.535314",

language = "English",

volume = "32",

pages = "43788--43804",

journal = "Optics express",

issn = "1094-4087",

publisher = "Optica Publishing Group (formerly OSA)",

number = "25",

}

TY - JOUR

T1 - Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects

AU - Krasnov, Vitaly

AU - Makhotkin, Igor

AU - Scheerder, Jeroen E.

AU - Loetgering, Lars

AU - Soltwisch, Victor

AU - van der Heide, Paul A.W.

AU - Fleischmann, Claudia

PY - 2024/12/2

Y1 - 2024/12/2

N2 - The results of a soft X-ray chemically sensitive ptychographic imaging of non-planar nanoscale 3D objects - atom probe tomography tips, with resolution down to 12 nm at 800 eV using scanning X-ray microscope at the electron storage ring BESSY II are presented. We validate that this approach can be used to determine the tip (emitter) shape, and to resolve inner nano-scale structures as relevant for semiconductor applications and even for quantitative chemical composition analysis. Imaging of buried interfaces with below 30 nm resolution is demonstrated. This work might pave the way for contactless, ptychographic in-situ characterization of APT tips with tabletop coherent EUV sources.

AB - The results of a soft X-ray chemically sensitive ptychographic imaging of non-planar nanoscale 3D objects - atom probe tomography tips, with resolution down to 12 nm at 800 eV using scanning X-ray microscope at the electron storage ring BESSY II are presented. We validate that this approach can be used to determine the tip (emitter) shape, and to resolve inner nano-scale structures as relevant for semiconductor applications and even for quantitative chemical composition analysis. Imaging of buried interfaces with below 30 nm resolution is demonstrated. This work might pave the way for contactless, ptychographic in-situ characterization of APT tips with tabletop coherent EUV sources.

UR - https://www.scopus.com/pages/publications/85211091513

U2 - 10.1364/OE.535314

DO - 10.1364/OE.535314

M3 - Article

AN - SCOPUS:85211091513

SN - 1094-4087

VL - 32

SP - 43788

EP - 43804

JO - Optics express

JF - Optics express

IS - 25

ER -

Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects

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