Sol-gel PZT films on Pt-coated substrates

Johannes G.E. Gardeniers, A. Smith, C. Cobianu

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationMicro Mechanics Europe Workshop
    Place of PublicationPisa, Italy
    Pages133-136
    Publication statusPublished - 5 Sept 1994

    Keywords

    • METIS-114086

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