Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato; Ruben Schupp; Lars Behnke; Yahia Y. Mostafa; Zoi Bouza; Adam Lassise; Muharrem Bayraktar; John Sheil; Ronnie Hoekstra; Wim Ubachs

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato^*, Ruben Schupp, Lars Behnke, Yahia Y. Mostafa, Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, Wim Ubachs

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources, EUVXRAY 2022
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781957171067
Publication status	Published - 2022
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2022 - Budapest, Hungary Duration: 21 Mar 2022 → 25 Mar 2022

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Compact EUV and X-ray Light Sources, EUVXRAY 2022
Abbreviated title	EUVXRAY 2022
Country/Territory	Hungary
City	Budapest
Period	21/03/22 → 25/03/22

Keywords

NLA

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

Versolato, O. O., Schupp, R., Behnke, L., Mostafa, Y. Y., Bouza, Z., Lassise, A., Bayraktar, M., Sheil, J., Hoekstra, R., & Ubachs, W. (2022). Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. In Compact EUV and X-ray Light Sources, EUVXRAY 2022 Article ETh5A.7 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA).

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title = "Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV",

abstract = "Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.",

keywords = "NLA",

author = "Versolato, {Oscar O.} and Ruben Schupp and Lars Behnke and Mostafa, {Yahia Y.} and Zoi Bouza and Adam Lassise and Muharrem Bayraktar and John Sheil and Ronnie Hoekstra and Wim Ubachs",

note = "Publisher Copyright: {\textcopyright} 2022 The Author (s); Compact EUV and X-ray Light Sources, EUVXRAY 2022, EUVXRAY 2022 ; Conference date: 21-03-2022 Through 25-03-2022",

year = "2022",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Compact EUV and X-ray Light Sources, EUVXRAY 2022",

address = "United States",

}

Versolato, OO, Schupp, R, Behnke, L, Mostafa, YY, Bouza, Z, Lassise, A, Bayraktar, M, Sheil, J, Hoekstra, R & Ubachs, W 2022, Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. in Compact EUV and X-ray Light Sources, EUVXRAY 2022., ETh5A.7, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Compact EUV and X-ray Light Sources, EUVXRAY 2022, Budapest, Hungary, 21/03/22.

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV. / Versolato, Oscar O.; Schupp, Ruben; Behnke, Lars et al.
Compact EUV and X-ray Light Sources, EUVXRAY 2022. Optica Publishing Group (formerly OSA), 2022. ETh5A.7 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

AU - Versolato, Oscar O.

AU - Schupp, Ruben

AU - Behnke, Lars

AU - Mostafa, Yahia Y.

AU - Bouza, Zoi

AU - Lassise, Adam

AU - Bayraktar, Muharrem

AU - Sheil, John

AU - Hoekstra, Ronnie

AU - Ubachs, Wim

PY - 2022

Y1 - 2022

N2 - Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

AB - Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

KW - NLA

UR - http://www.scopus.com/inward/record.url?scp=85136803032&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85136803032

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources, EUVXRAY 2022

PB - Optica Publishing Group (formerly OSA)

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2022

Y2 - 21 March 2022 through 25 March 2022

ER -

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Abstract

Publication series

Conference

Keywords

UN SDGs

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