Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato*, Ruben Schupp, Lars Behnke, Yahia Y. Mostafa, Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, Wim Ubachs

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

Original languageEnglish
Title of host publicationCompact EUV and X-ray Light Sources, EUVXRAY 2022
PublisherOptica Publishing Group
ISBN (Electronic)9781957171067
Publication statusPublished - 2022
EventCompact EUV and X-ray Light Sources, EUVXRAY 2022 - Budapest, Hungary
Duration: 21 Mar 202225 Mar 2022

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceCompact EUV and X-ray Light Sources, EUVXRAY 2022
Abbreviated titleEUVXRAY 2022
Country/TerritoryHungary
CityBudapest
Period21/03/2225/03/22

Keywords

  • NLA

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