Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato*, Ruben Schupp, Lars Behnke, Yahia Y. Mostafa, Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, Wim Ubachs

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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