Abstract
The quality factor (Q) of the Solidly Mounted Resonator is limited by acoustic losses caused by waves leaking through the mirror stack. Traditionally employed acoustic mirror reflects only longitudinal waves and not shear waves. Starting with the stop-band theory and the principle of spacer layers in Optics, we present a design procedure which gives the modified thicknesses for the reflector stack to efficiently reflect both the waves. FEM simulations were performed for verifying the results based on the analytical model described in showing good agreement. With the optimized design, we can obtain a minimum transmission for longitudinal and shear waves of -25 dB and -20 dB at resonant frequencies for longitudinal and shear waves, respectively, for various reflector material combinations. With such optimized designs, devices can be designed that are no more limited by acoustic loss into the substrate.
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors |
| Place of Publication | Utrecht, The Netherlands |
| Publisher | STW |
| Pages | 159-162 |
| Number of pages | 4 |
| ISBN (Print) | 978-90-73461-62-8 |
| Publication status | Published - 26 Nov 2009 |
| Event | 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands Duration: 26 Nov 2009 → 27 Nov 2009 Conference number: 12 |
Publication series
| Name | |
|---|---|
| Publisher | Technology Foundation STW |
Conference
| Conference | 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 |
|---|---|
| Abbreviated title | SAFE |
| Country | Netherlands |
| City | Veldhoven |
| Period | 26/11/09 → 27/11/09 |
Keywords
- IR-69055
- METIS-264456
- Acoustic mirror
- Bulk Acoustic Wave (BAW)
- SC-DPM: Device Physics and Modeling
- Stop-band theory
- Transmission curve
- EWI-17063
- Solidly Mounted Resonator (SMR)
Cite this
Jose, S., Jansman, A., & Hueting, R. J. E. (2009). Solidly Mounted Resonator with Optimized Acoustic Reflector. In Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (pp. 159-162). Utrecht, The Netherlands: STW.