Solidly Mounted Resonator with Optimized Acoustic Reflector

Sumy Jose, Andreas Jansman, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    The quality factor (Q) of the Solidly Mounted Resonator is limited by acoustic losses caused by waves leaking through the mirror stack. Traditionally employed acoustic mirror reflects only longitudinal waves and not shear waves. Starting with the stop-band theory and the principle of spacer layers in Optics, we present a design procedure which gives the modified thicknesses for the reflector stack to efficiently reflect both the waves. FEM simulations were performed for verifying the results based on the analytical model described in showing good agreement. With the optimized design, we can obtain a minimum transmission for longitudinal and shear waves of -25 dB and -20 dB at resonant frequencies for longitudinal and shear waves, respectively, for various reflector material combinations. With such optimized designs, devices can be designed that are no more limited by acoustic loss into the substrate.
    Original languageUndefined
    Title of host publicationProceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages159-162
    Number of pages4
    ISBN (Print)978-90-73461-62-8
    Publication statusPublished - 26 Nov 2009
    Event12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands
    Duration: 26 Nov 200927 Nov 2009
    Conference number: 12

    Publication series

    Name
    PublisherTechnology Foundation STW

    Conference

    Conference12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period26/11/0927/11/09

    Keywords

    • IR-69055
    • METIS-264456
    • Acoustic mirror
    • Bulk Acoustic Wave (BAW)
    • SC-DPM: Device Physics and Modeling
    • Stop-band theory
    • Transmission curve
    • EWI-17063
    • Solidly Mounted Resonator (SMR)

    Cite this

    Jose, S., Jansman, A., & Hueting, R. J. E. (2009). Solidly Mounted Resonator with Optimized Acoustic Reflector. In Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (pp. 159-162). Utrecht, The Netherlands: STW.