Some selected research item of the micro mechanics department at MESA

Michael Curt Elwenspoek

Some selected research item of the micro mechanics department at MESA

Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

171 Downloads (Pure)

Abstract

New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.

Original language	Undefined
Title of host publication	Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings
Place of Publication	Piscataway
Publisher	IEEE
Pages	8-31
Number of pages	24
ISBN (Print)	0-7803-2095-6
Publication status	Published - 2 Oct 1994
Event	1994 5th International Symposium on Micro Machine and Human Science Proceedings - Nagoya, Jpn Duration: 2 Oct 1994 → 4 Oct 1994

Publication series

Name
Publisher	IEEE

Conference

Conference	1994 5th International Symposium on Micro Machine and Human Science Proceedings
Period	2/10/94 → 4/10/94
Other	2-4 October 1994

Keywords

EWI-14052
METIS-114102
IR-17207

Access to Document

http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=512894

Cite this

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title = "Some selected research item of the micro mechanics department at MESA",

abstract = "New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.",

keywords = "EWI-14052, METIS-114102, IR-17207",

author = "Elwenspoek, {Michael Curt}",

year = "1994",

month = oct,

day = "2",

language = "Undefined",

isbn = "0-7803-2095-6",

publisher = "IEEE",

pages = "8--31",

booktitle = "Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings",

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note = "1994 5th International Symposium on Micro Machine and Human Science Proceedings ; Conference date: 02-10-1994 Through 04-10-1994",

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Elwenspoek, MC 1994, Some selected research item of the micro mechanics department at MESA. in Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings. IEEE, Piscataway, pp. 8-31, 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2/10/94. <http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=512894>

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AU - Elwenspoek, Michael Curt

PY - 1994/10/2

Y1 - 1994/10/2

N2 - New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.

AB - New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.

KW - EWI-14052

KW - METIS-114102

KW - IR-17207

M3 - Conference contribution

SN - 0-7803-2095-6

SP - 8

EP - 31

BT - Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings

PB - IEEE

CY - Piscataway

T2 - 1994 5th International Symposium on Micro Machine and Human Science Proceedings

Y2 - 2 October 1994 through 4 October 1994

ER -