New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.
|Conference||1994 5th International Symposium on Micro Machine and Human Science Proceedings|
|Period||2/10/94 → 4/10/94|
|Other||2-4 October 1994|