Some selected research item of the micro mechanics department at MESA

Michael Curt Elwenspoek

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    Abstract

    New developments within the micro mechanics department at MESA are presented. The developments are: (1) a description will be provided of dry etch processes-reactive ion etching, RIE-of silicon in a mixture of SF6, 02, and CHF3. (2) The design, fabrication and performance of new electrostatic actuators will be described and (3) Micro liquid handling system such as pumps, valves and flow sensors have along tradition in the laboratory. These developments are further elaborated.
    Original languageUndefined
    Title of host publicationProceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages8-31
    Number of pages24
    ISBN (Print)0-7803-2095-6
    Publication statusPublished - 2 Oct 1994

    Publication series

    Name
    PublisherIEEE

    Keywords

    • EWI-14052
    • METIS-114102
    • IR-17207

    Cite this

    Elwenspoek, M. C. (1994). Some selected research item of the micro mechanics department at MESA. In Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings (pp. 8-31). Piscataway: IEEE Computer Society.