Source plasma emission spectrum under various operating conditions

Fei Liu, Muharrem Bayraktar, Tim Goossens, F. Bijkerk, Jorge Quintana Ramirez, Tijs Beenhakker

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 21 Jun 2018
Event	19th ASML Technology Conference 2018 - Vedlhoven, Netherlands Duration: 21 Jun 2018 → 21 Jun 2018 Conference number: 19

Conference	19th ASML Technology Conference 2018
Country/Territory	Netherlands
City	Vedlhoven
Period	21/06/18 → 21/06/18

Cite this

@conference{eae62b0856de4cdb883363cf71313e92,

title = "Source plasma emission spectrum under various operating conditions",

author = "Fei Liu and Muharrem Bayraktar and Tim Goossens and F. Bijkerk and {Quintana Ramirez}, Jorge and Tijs Beenhakker",

year = "2018",

month = jun,

day = "21",

language = "English",

note = "19th ASML Technology Conference 2018 ; Conference date: 21-06-2018 Through 21-06-2018",

}