Source plasma emission spectrum under various operating conditions

Fei Liu, Muharrem Bayraktar, Tim Goossens, F. Bijkerk, Jorge Quintana Ramirez, Tijs Beenhakker

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 21 Jun 2018
Event19th ASML Technology Conference 2018 - Vedlhoven, Netherlands
Duration: 21 Jun 201821 Jun 2018
Conference number: 19

Conference

Conference19th ASML Technology Conference 2018
CountryNetherlands
CityVedlhoven
Period21/06/1821/06/18

Cite this

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J., & Beenhakker, T. (2018). Source plasma emission spectrum under various operating conditions. Poster session presented at 19th ASML Technology Conference 2018, Vedlhoven, Netherlands.
Liu, Fei ; Bayraktar, Muharrem ; Goossens, Tim ; Bijkerk, F. ; Quintana Ramirez, Jorge ; Beenhakker, Tijs. / Source plasma emission spectrum under various operating conditions. Poster session presented at 19th ASML Technology Conference 2018, Vedlhoven, Netherlands.
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title = "Source plasma emission spectrum under various operating conditions",
author = "Fei Liu and Muharrem Bayraktar and Tim Goossens and F. Bijkerk and {Quintana Ramirez}, Jorge and Tijs Beenhakker",
year = "2018",
month = "6",
day = "21",
language = "English",
note = "19th ASML Technology Conference 2018 ; Conference date: 21-06-2018 Through 21-06-2018",

}

Liu, F, Bayraktar, M, Goossens, T, Bijkerk, F, Quintana Ramirez, J & Beenhakker, T 2018, 'Source plasma emission spectrum under various operating conditions' 19th ASML Technology Conference 2018, Vedlhoven, Netherlands, 21/06/18 - 21/06/18, .

Source plasma emission spectrum under various operating conditions. / Liu, Fei; Bayraktar, Muharrem ; Goossens, Tim; Bijkerk, F.; Quintana Ramirez, Jorge; Beenhakker, Tijs.

2018. Poster session presented at 19th ASML Technology Conference 2018, Vedlhoven, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Source plasma emission spectrum under various operating conditions

AU - Liu, Fei

AU - Bayraktar, Muharrem

AU - Goossens, Tim

AU - Bijkerk, F.

AU - Quintana Ramirez, Jorge

AU - Beenhakker, Tijs

PY - 2018/6/21

Y1 - 2018/6/21

M3 - Poster

ER -

Liu F, Bayraktar M, Goossens T, Bijkerk F, Quintana Ramirez J, Beenhakker T. Source plasma emission spectrum under various operating conditions. 2018. Poster session presented at 19th ASML Technology Conference 2018, Vedlhoven, Netherlands.