Source plasma emission spectrum under various operating conditions

Fei Liu, Muharrem Bayraktar, Tim Goossens, F. Bijkerk, Jorge Quintana Ramirez, Tijs Beenhakker

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 21 Jun 2018
Event19th ASML Technology Conference 2018 - Vedlhoven, Netherlands
Duration: 21 Jun 201821 Jun 2018
Conference number: 19

Conference

Conference19th ASML Technology Conference 2018
CountryNetherlands
CityVedlhoven
Period21/06/1821/06/18

Cite this

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J., & Beenhakker, T. (2018). Source plasma emission spectrum under various operating conditions. Poster session presented at 19th ASML Technology Conference 2018, Vedlhoven, Netherlands.