Space-time discontinuous Galerkin method for wet-chemical etching of mircrostructures

J.J.S. Janivita Joto Sudirham, Rudolf M.J. van Damme, Jacobus J.W. van der Vegt

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    Abstract

    In this paper we discuss the application of a space-time discontinuous Galerkin finite element method for convection diffusion problems to the simulation of wet-chemical etching of microstructures. In the space-time DG method no distinction is made in the discretization between the space and time variables and discontinuous basis functions are used both in space and time. This approach results in an effcient numerical technique to deal with time-dependent flow domains as occur in wet-chemical etching, while main-taining a fully conservative discretization. The method offers great flexibility in mesh adaptation and special attention is given to the generation of an initial solution and mesh when there is no etching cavity yet. Numerical simulations of the etching of a two-dimensional slit are discussed for different regimes, namely diusion-controlled and convection-dominated etching. These results show good agreement with analytical results in the diffusion-controlled regime. Using a simple model for the fluid velocity the typical asymmetric etching cavities are obtained in the convection dominated regime and the results agree qualitatively well with those obtained from full Navier-Stokes simulations.
    Original languageUndefined
    Title of host publicationProceedings of Fourth European Congress on Computational Methods in Applied Sciences, ECCOMAS 2004
    EditorsP. Neittaanmäki, T. Rossi, K. Majava, O. Pironneau
    Place of PublicationJyväskylä, Finland
    PublisherUniversity of Jyväskylä
    Pages1-17
    Number of pages17
    ISBN (Print)9513918688
    Publication statusPublished - 2004
    Event4th European Congress on Computational Methods in Applied Sciences, ECCOMAS 2004 - Jyväskylä, Finland
    Duration: 24 Jul 200428 Jul 2004
    Conference number: 4

    Publication series

    Name
    PublisherUniversity of Jyväskylä

    Conference

    Conference4th European Congress on Computational Methods in Applied Sciences, ECCOMAS 2004
    Abbreviated titleECCOMAS
    CountryFinland
    CityJyväskylä
    Period24/07/0428/07/04

    Keywords

    • EWI-12236
    • IR-74621
    • METIS-221830
    • Wet chemical etching
    • Discontinuous Galerkin finite element methods

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