Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew; Hubertus M.J. Bastiaens; Klaus J. Boller; P.J.M. Peters

doi:10.1117/12.622900

Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

Original language	English
Title of host publication	Lasers and Applications
Editors	K.M. Abramski, A. Lapucci, E.F. Plinski
Place of Publication	Bellingham, Washington, USA
Publisher	SPIE - The International Society for Optical Engineering
Pages	59581A-1-59581A-5
Number of pages	5
ISBN (Print)	0-8194-5965-8
DOIs	https://doi.org/10.1117/12.622900
Publication status	Published - 28 Aug 2005

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	5958
ISSN (Print)	0277-786X

Keywords

METIS-226198
IR-96102

Access to Document

10.1117/12.622900

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Mathew, D., Bastiaens, H. M. J., Boller, K. J., & Peters, P. J. M. (2005). Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. In K. M. Abramski, A. Lapucci, & E. F. Plinski (Eds.), Lasers and Applications (pp. 59581A-1-59581A-5). (Proceedings of SPIE; Vol. 5958). Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.622900

Mathew, D. ; Bastiaens, Hubertus M.J. ; Boller, Klaus J. ; Peters, P.J.M. / Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. Lasers and Applications. editor / K.M. Abramski ; A. Lapucci ; E.F. Plinski. Bellingham, Washington, USA : SPIE - The International Society for Optical Engineering, 2005. pp. 59581A-1-59581A-5 (Proceedings of SPIE).

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title = "Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures",

abstract = "The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.",

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Mathew, D, Bastiaens, HMJ , Boller, KJ & Peters, PJM 2005, Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. in KM Abramski, A Lapucci & EF Plinski (eds), Lasers and Applications. Proceedings of SPIE, vol. 5958, SPIE - The International Society for Optical Engineering, Bellingham, Washington, USA, pp. 59581A-1-59581A-5. https://doi.org/10.1117/12.622900

Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. / Mathew, D.; Bastiaens, Hubertus M.J.; Boller, Klaus J.; Peters, P.J.M.

Lasers and Applications. ed. / K.M. Abramski; A. Lapucci; E.F. Plinski. Bellingham, Washington, USA : SPIE - The International Society for Optical Engineering, 2005. p. 59581A-1-59581A-5 (Proceedings of SPIE; Vol. 5958).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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N2 - The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

AB - The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

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KW - IR-96102

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DO - 10.1117/12.622900

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BT - Lasers and Applications

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Mathew D, Bastiaens HMJ , Boller KJ, Peters PJM. Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. In Abramski KM, Lapucci A, Plinski EF, editors, Lasers and Applications. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. 2005. p. 59581A-1-59581A-5. (Proceedings of SPIE). https://doi.org/10.1117/12.622900