Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.
Original languageEnglish
Title of host publicationLasers and Applications
EditorsK.M. Abramski, A. Lapucci, E.F. Plinski
Place of PublicationBellingham, Washington, USA
PublisherSPIE - The International Society for Optical Engineering
Pages59581A-1-59581A-5
Number of pages5
ISBN (Print)0-8194-5965-8
DOIs
Publication statusPublished - 28 Aug 2005

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume5958
ISSN (Print)0277-786X

Fingerprint

excimer lasers
gas mixtures
fluorine
cathodes
CCD cameras
homogeneity
filaments
buffers
chambers
fluorescence
gases
x rays

Keywords

  • METIS-226198
  • IR-96102

Cite this

Mathew, D., Bastiaens, H. M. J., Boller, K. J., & Peters, P. J. M. (2005). Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. In K. M. Abramski, A. Lapucci, & E. F. Plinski (Eds.), Lasers and Applications (pp. 59581A-1-59581A-5). (Proceedings of SPIE; Vol. 5958). Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.622900
Mathew, D. ; Bastiaens, Hubertus M.J. ; Boller, Klaus J. ; Peters, P.J.M. / Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. Lasers and Applications. editor / K.M. Abramski ; A. Lapucci ; E.F. Plinski. Bellingham, Washington, USA : SPIE - The International Society for Optical Engineering, 2005. pp. 59581A-1-59581A-5 (Proceedings of SPIE).
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abstract = "The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.",
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Mathew, D, Bastiaens, HMJ, Boller, KJ & Peters, PJM 2005, Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. in KM Abramski, A Lapucci & EF Plinski (eds), Lasers and Applications. Proceedings of SPIE, vol. 5958, SPIE - The International Society for Optical Engineering, Bellingham, Washington, USA, pp. 59581A-1-59581A-5. https://doi.org/10.1117/12.622900

Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. / Mathew, D.; Bastiaens, Hubertus M.J.; Boller, Klaus J.; Peters, P.J.M.

Lasers and Applications. ed. / K.M. Abramski; A. Lapucci; E.F. Plinski. Bellingham, Washington, USA : SPIE - The International Society for Optical Engineering, 2005. p. 59581A-1-59581A-5 (Proceedings of SPIE; Vol. 5958).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

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N2 - The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

AB - The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.

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KW - IR-96102

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Mathew D, Bastiaens HMJ, Boller KJ, Peters PJM. Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. In Abramski KM, Lapucci A, Plinski EF, editors, Lasers and Applications. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. 2005. p. 59581A-1-59581A-5. (Proceedings of SPIE). https://doi.org/10.1117/12.622900