Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures

D. Mathew, Hubertus M.J. Bastiaens, Klaus J. Boller, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.
Original languageEnglish
Title of host publicationLasers and Applications
EditorsK.M. Abramski, A. Lapucci, E.F. Plinski
Place of PublicationBellingham, Washington, USA
PublisherSPIE - The International Society for Optical Engineering
Pages59581A-1-59581A-5
Number of pages5
ISBN (Print)0-8194-5965-8
DOIs
Publication statusPublished - 28 Aug 2005

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume5958
ISSN (Print)0277-786X

Keywords

  • METIS-226198
  • IR-96102

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  • Cite this

    Mathew, D., Bastiaens, H. M. J., Boller, K. J., & Peters, P. J. M. (2005). Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures. In K. M. Abramski, A. Lapucci, & E. F. Plinski (Eds.), Lasers and Applications (pp. 59581A-1-59581A-5). (Proceedings of SPIE; Vol. 5958). Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.622900