Abstract
In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechanical oscillation of the piezoelectric membrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position-and size-dependent displacement.
Original language | English |
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Pages (from-to) | 1059-1067 |
Number of pages | 9 |
Journal | Beilstein journal of nanotechnology |
Volume | 14 |
DOIs | |
Publication status | Published - 2023 |
Keywords
- Kelvin probe force microscopy (KPFM)
- light-driven micro/nano systems
- piezoelectric membrane
- surface photovoltage (SPV)
- time-dependent AFM