The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.
|Number of pages||1|
|Journal||IEEE Transactions on Semiconductor Manufacturing|
|Publication status||Published - 3 Feb 2009|
|Event||21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom|
Duration: 24 Mar 2008 → 27 Mar 2008
Conference number: 21