Abstract
The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.
Original language | English |
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Pages (from-to) | 50-50 |
Number of pages | 1 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 22 |
Issue number | 1 |
DOIs | |
Publication status | Published - 3 Feb 2009 |
Event | 21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom Duration: 24 Mar 2008 → 27 Mar 2008 Conference number: 21 http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf |
Keywords
- EWI-15296
- METIS-263819
- IR-65467