Special Section on the 2008 International Conference on Microelectronic Test Structure

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    Abstract

    The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.
    Original languageEnglish
    Pages (from-to)50-50
    Number of pages1
    JournalIEEE Transactions on Semiconductor Manufacturing
    Volume22
    Issue number1
    DOIs
    Publication statusPublished - 3 Feb 2009
    Event21st IEEE International Conference on Microelectronic Test Structures, ICMTS 2008 - University of Edinburgh, Edinburgh, United Kingdom
    Duration: 24 Mar 200827 Mar 2008
    Conference number: 21
    http://www.homepages.ed.ac.uk/ajw/ICMTS/prog08.pdf

    Keywords

    • EWI-15296
    • METIS-263819
    • IR-65467

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