Spectral purity performance of high-power EUV systems

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen, Xueqing Zhang, Robert de Kruif, Natalia Davydova, Guido Schiffelers, Felix Wählish, Eelco van Setten, Wouter Varenkamp, Kees Ricken, Laurens de Winter, John McNamara, Muharrem Bayraktar

XUV Optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

7 Citations (Scopus)

268 Downloads (Pure)

7 Citations
1 Article

1 results

2020
High-power EUV lithography: spectral purity and imaging performance
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., Bayraktar, M., de Kruif, R. & Davydova, N., 22 Sept 2020, In: Journal of micro/nanolithography, MEMS, and MOEMS. 19, 3, 16 p., 033801.
Research output: Contribution to journal › Article › Academic › peer-review

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16 Citations (Scopus)

986 Downloads (Pure)

Spectral purity performance of high-power EUV systems

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Search results

High-power EUV lithography: spectral purity and imaging performance