Spectral Unraveling of EUV Lithography Light Sources

Zoi Bouza; Joris Scheers; J. Sheil; Ruben Schupp; Muharrem  Bayraktar; F. Bijkerk; C Shah; H. Bekker; W. Ubachs; R. Hoekstra; Oscar Versolato

Spectral Unraveling of EUV Lithography Light Sources

Zoi Bouza, Joris Scheers, J. Sheil, Ruben Schupp, Muharrem Bayraktar, F. Bijkerk, C Shah, H. Bekker, W. Ubachs, R. Hoekstra, Oscar Versolato

XUV Optics

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 10 May 2019
Event	Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas - ICTP Euler Lecture Hall, Trieste, Italy Duration: 6 May 2019 → 10 May 2019 http://indico.ictp.it/event/8660/

Workshop

Workshop	Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas
Country/Territory	Italy
City	Trieste
Period	6/05/19 → 10/05/19
Internet address	http://indico.ictp.it/event/8660/

Cite this

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title = "Spectral Unraveling of EUV Lithography Light Sources",

author = "Zoi Bouza and Joris Scheers and J. Sheil and Ruben Schupp and Muharrem Bayraktar and F. Bijkerk and C Shah and H. Bekker and W. Ubachs and R. Hoekstra and Oscar Versolato",

year = "2019",

month = may,

day = "10",

language = "English",

note = "Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas ; Conference date: 06-05-2019 Through 10-05-2019",

url = "http://indico.ictp.it/event/8660/",

}

TY - CONF

T1 - Spectral Unraveling of EUV Lithography Light Sources

AU - Bouza, Zoi

AU - Scheers, Joris

AU - Sheil, J.

AU - Schupp, Ruben

AU - Bayraktar, Muharrem

AU - Bijkerk, F.

AU - Shah, C

AU - Bekker, H.

AU - Ubachs, W.

AU - Hoekstra, R.

AU - Versolato, Oscar

PY - 2019/5/10

Y1 - 2019/5/10

M3 - Poster

T2 - Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas

Y2 - 6 May 2019 through 10 May 2019

ER -