Spectral Unraveling of EUV Lithography Light Sources

Zoi Bouza, Joris Scheers, J. Sheil, Ruben Schupp, Muharrem Bayraktar, F. Bijkerk, C Shah, H. Bekker, W. Ubachs, R. Hoekstra, Oscar Versolato

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 10 May 2019
EventJoint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas - ICTP Euler Lecture Hall, Trieste, Italy
Duration: 6 May 201910 May 2019
http://indico.ictp.it/event/8660/

Workshop

WorkshopJoint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas
CountryItaly
CityTrieste
Period6/05/1910/05/19
Internet address

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