Spectral Unraveling of EUV Lithography Light Sources

Zoi Bouza, Joris Scheers, J. Sheil, Ruben Schupp, Muharrem Bayraktar, F. Bijkerk, C Shah, H. Bekker, W. Ubachs, R. Hoekstra, Oscar Versolato

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 10 May 2019
EventJoint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas - ICTP Euler Lecture Hall, Trieste, Italy
Duration: 6 May 201910 May 2019
http://indico.ictp.it/event/8660/

Workshop

WorkshopJoint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas
CountryItaly
CityTrieste
Period6/05/1910/05/19
Internet address

Cite this

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Bayraktar, M., Bijkerk, F., ... Versolato, O. (2019). Spectral Unraveling of EUV Lithography Light Sources. Poster session presented at Joint ICTP-IAEA School on Atomic and Molecular Spectroscopy in Plasmas, Trieste, Italy.