Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Oscar Versolato, Alex Bayerle, Muharrem Bayraktar, Lars Behnke, H. Bekker, Zoi Bouza, James Colgan, J Crespo Lopez-Urrutia, M J Deuzeman, R. Hoekstra, Dmitry Kurilovich, L Poirier, Bo Liu, Randy Meijer, Amanda Neukirch, S Rai, A Ryabtsev, S. Witte, Joris Scheers, Ruben SchuppJ. Sheil, Francesco Torretti, W. Ubachs

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 24 Jul 2019
EventXXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019 - Centre International de Deauville, Deauville, France
Duration: 23 Jul 201930 Jul 2019
Conference number: 31
http://www.icpeac2019.fr/

Conference

ConferenceXXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019
Abbreviated titleICPEAC 2019
CountryFrance
CityDeauville
Period23/07/1930/07/19
Internet address

Cite this

Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., ... Ubachs, W. (2019). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. Poster session presented at XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019, Deauville, France.