Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Oscar Versolato; Alex Bayerle; Muharrem  Bayraktar; Lars Behnke; H. Bekker; Zoi Bouza; James Colgan; J Crespo Lopez-Urrutia; M J Deuzeman; R. Hoekstra; Dmitry Kurilovich; L Poirier; Bo Liu; Randy Meijer; Amanda Neukirch; S Rai; A Ryabtsev; S. Witte; Joris Scheers; Ruben Schupp; J. Sheil; Francesco Torretti; W. Ubachs

doi:10.1088/1742-6596/1412/19/192006

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Oscar Versolato^*
, Alex Bayerle
, Muharrem Bayraktar
, Lars Behnke
, H. Bekker
, Zoi Bouza
, James Colgan
, J Crespo Lopez-Urrutia
, M J Deuzeman
, R. Hoekstra
, Dmitry Kurilovich
, L Poirier
, Bo Liu
, Randy Meijer
, Amanda Neukirch
, S Rai
, A Ryabtsev
, S. Witte
, Joris Scheers
, Ruben Schupp

J. Sheil, Francesco Torretti, W. Ubachs

^*Corresponding author for this work

XUV Optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?

Original language	English
Title of host publication	Journal of Physics: Conference Series
Subtitle of host publication	Plasmas & Particle acceleration
Volume	1412
Edition	19
DOIs	https://doi.org/10.1088/1742-6596/1412/19/192006
Publication status	Published - 11 Jun 2020
Event	XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019 - Centre International de Deauville, Deauville, France Duration: 23 Jul 2019 → 30 Jul 2019 Conference number: 31 http://www.icpeac2019.fr/

Publication series

Name	Journal of physics: Conference series
Publisher	IOP Publishing Ltd.
ISSN (Print)	1742-6588

Conference

Conference	XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019
Abbreviated title	ICPEAC 2019
Country/Territory	France
City	Deauville
Period	23/07/19 → 30/07/19
Internet address	http://www.icpeac2019.fr/

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1088/1742-6596/1412/19/192006Licence: CC BY

Versolato_2020_J._Phys.__Conf._Ser._1412_192006Final published version, 531 KBLicence: CC BY

Cite this

Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., ... Ubachs, W. (2020). Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration (19 ed., Vol. 1412). (Journal of physics: Conference series). https://doi.org/10.1088/1742-6596/1412/19/192006

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title = "Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography",

abstract = "Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?",

author = "Oscar Versolato and Alex Bayerle and Muharrem Bayraktar and Lars Behnke and H. Bekker and Zoi Bouza and James Colgan and \{Crespo Lopez-Urrutia\}, J and Deuzeman, \{M J\} and R. Hoekstra and Dmitry Kurilovich and L Poirier and Bo Liu and Randy Meijer and Amanda Neukirch and S Rai and A Ryabtsev and S. Witte and Joris Scheers and Ruben Schupp and J. Sheil and Francesco Torretti and W. Ubachs",

year = "2020",

month = jun,

day = "11",

doi = "10.1088/1742-6596/1412/19/192006",

language = "English",

volume = "1412",

series = "Journal of physics: Conference series",

publisher = "IOP Publishing Ltd.",

booktitle = "Journal of Physics: Conference Series",

edition = "19",

note = "XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019, ICPEAC 2019 ; Conference date: 23-07-2019 Through 30-07-2019",

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Versolato, O, Bayerle, A, Bayraktar, M, Behnke, L, Bekker, H, Bouza, Z, Colgan, J, Crespo Lopez-Urrutia, J, Deuzeman, MJ, Hoekstra, R, Kurilovich, D, Poirier, L, Liu, B, Meijer, R, Neukirch, A, Rai, S, Ryabtsev, A, Witte, S, Scheers, J, Schupp, R, Sheil, J, Torretti, F & Ubachs, W 2020, Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. in Journal of Physics: Conference Series: Plasmas & Particle acceleration. 19 edn, vol. 1412, Journal of physics: Conference series, XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019, Deauville, France, 23/07/19. https://doi.org/10.1088/1742-6596/1412/19/192006

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. / Versolato, Oscar; Bayerle, Alex; Bayraktar, Muharrem et al.
Journal of Physics: Conference Series: Plasmas & Particle acceleration. Vol. 1412 19. ed. 2020. (Journal of physics: Conference series).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

AU - Versolato, Oscar

AU - Bayerle, Alex

AU - Bayraktar, Muharrem

AU - Behnke, Lars

AU - Bekker, H.

AU - Bouza, Zoi

AU - Colgan, James

AU - Crespo Lopez-Urrutia, J

AU - Deuzeman, M J

AU - Hoekstra, R.

AU - Kurilovich, Dmitry

AU - Poirier, L

AU - Liu, Bo

AU - Meijer, Randy

AU - Neukirch, Amanda

AU - Rai, S

AU - Ryabtsev, A

AU - Witte, S.

AU - Scheers, Joris

AU - Schupp, Ruben

AU - Sheil, J.

AU - Torretti, Francesco

AU - Ubachs, W.

N1 - Conference code: 31

PY - 2020/6/11

Y1 - 2020/6/11

N2 - Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?

AB - Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV light at the required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on the spectroscopy of tin ions in and out of YAG-laserdriven plasma and present a surprising answer to the key question: what makes that light?

UR - https://www.scopus.com/pages/publications/85086642813

U2 - 10.1088/1742-6596/1412/19/192006

DO - 10.1088/1742-6596/1412/19/192006

M3 - Conference contribution

VL - 1412

T3 - Journal of physics: Conference series

BT - Journal of Physics: Conference Series

T2 - XXXIst International Conference on Photonic, Electronic, and Atomic Collisions 2019

Y2 - 23 July 2019 through 30 July 2019

ER -

Versolato O, Bayerle A, Bayraktar M, Behnke L, Bekker H, Bouza Z et al. Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography. In Journal of Physics: Conference Series: Plasmas & Particle acceleration. 19 ed. Vol. 1412. 2020. (Journal of physics: Conference series). doi: 10.1088/1742-6596/1412/19/192006

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

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UN SDGs

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Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

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