Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Research output

Research output per year 2019 2019 2019

• 1 Poster

Research output per year

Research output per year

Search results

• 2019

  Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

  Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., Schupp, R., & 3 othersSheil, J., Torretti, F. & Ubachs, W., 24 Jul 2019.

  Research output: Contribution to conference › Poster › Academic