Spectroscopic Measurements of Sn Laser-Produced Plasmas

L. Behnke; R. Schupp; Z. Bouza; J. Scheers; J. Sheil; F. Torretti; M. Bayraktar; C. Shah; J.R. Crespo Lopez-Urrutia; W. Ubachs; R. Hoekstra; O.O. Versolato

Spectroscopic Measurements of Sn Laser-Produced Plasmas

L. Behnke, R. Schupp, Z. Bouza, J. Scheers, J. Sheil, F. Torretti, M. Bayraktar, C. Shah, J.R. Crespo Lopez-Urrutia, W. Ubachs, R. Hoekstra, O.O. Versolato

XUV Optics

Research output: Contribution to conference › Poster › Academic

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Original language	English
Publication status	Published - 4 Nov 2019
Event	EUV Source Workshop 2019 - ARCNL, Amsterdam, Netherlands Duration: 4 Nov 2019 → 6 Nov 2019

Workshop

Workshop	EUV Source Workshop 2019
Country/Territory	Netherlands
City	Amsterdam
Period	4/11/19 → 6/11/19

Access to Document

S84Final published version, 1.65 MB

http://www.euvlitho.com/2019/S84.pdf

Cite this

@conference{ddd28e8ee9434beabe37e250c35ac52b,

title = "Spectroscopic Measurements of Sn Laser-Produced Plasmas",

author = "L. Behnke and R. Schupp and Z. Bouza and J. Scheers and J. Sheil and F. Torretti and M. Bayraktar and C. Shah and {Crespo Lopez-Urrutia}, J.R. and W. Ubachs and R. Hoekstra and O.O. Versolato",

year = "2019",

month = nov,

day = "4",

language = "English",

note = "EUV Source Workshop 2019 ; Conference date: 04-11-2019 Through 06-11-2019",

}

TY - CONF

T1 - Spectroscopic Measurements of Sn Laser-Produced Plasmas

AU - Behnke, L.

AU - Schupp, R.

AU - Bouza, Z.

AU - Scheers, J.

AU - Sheil, J.

AU - Torretti, F.

AU - Bayraktar, M.

AU - Shah, C.

AU - Crespo Lopez-Urrutia, J.R.

AU - Ubachs, W.

AU - Hoekstra, R.

AU - Versolato, O.O.

PY - 2019/11/4

Y1 - 2019/11/4

M3 - Poster

T2 - EUV Source Workshop 2019

Y2 - 4 November 2019 through 6 November 2019

ER -