Sphericity and twist as functional parameters to represent surface geometries

J. Meijer

doi:10.1117/12.141000

Sphericity and twist as functional parameters to represent surface geometries

J. Meijer

Faculty of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.

Original language	English
Title of host publication	Specification and Measurement of Optical Systems
Editors	Lionel R. Baker
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	131-138
ISBN (Print)	9780819409607
DOIs	https://doi.org/10.1117/12.141000
Publication status	Published - 14 Sep 1993

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	1781
ISSN (Print)	0277-786X

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Keywords

METIS-144462
IR-96142

Cite this

Meijer, J. (1993). Sphericity and twist as functional parameters to represent surface geometries. In L. R. Baker (Ed.), Specification and Measurement of Optical Systems (pp. 131-138). (Proceedings of SPIE; Vol. 1781). Bellingham, WA, USA: SPIE. https://doi.org/10.1117/12.141000

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10.1117/12.141000

131_1
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