Sphericity and twist as functional parameters to represent surface geometries

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

262 Downloads (Pure)

Abstract

Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.
Original languageEnglish
Title of host publicationSpecification and Measurement of Optical Systems
EditorsLionel R. Baker
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages131-138
ISBN (Print)9780819409607
DOIs
Publication statusPublished - 14 Sep 1993

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume1781
ISSN (Print)0277-786X

Fingerprint

geometry
contour map
environmental conditions
moisture
parameter
temperature
method
electronics

Keywords

  • METIS-144462
  • IR-96142

Cite this

Meijer, J. (1993). Sphericity and twist as functional parameters to represent surface geometries. In L. R. Baker (Ed.), Specification and Measurement of Optical Systems (pp. 131-138). (Proceedings of SPIE; Vol. 1781). Bellingham, WA, USA: SPIE. https://doi.org/10.1117/12.141000
Meijer, J. / Sphericity and twist as functional parameters to represent surface geometries. Specification and Measurement of Optical Systems. editor / Lionel R. Baker. Bellingham, WA, USA : SPIE, 1993. pp. 131-138 (Proceedings of SPIE).
@inproceedings{3313d482e94043619c563479b3563e31,
title = "Sphericity and twist as functional parameters to represent surface geometries",
abstract = "Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.",
keywords = "METIS-144462, IR-96142",
author = "J. Meijer",
year = "1993",
month = "9",
day = "14",
doi = "10.1117/12.141000",
language = "English",
isbn = "9780819409607",
series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "131--138",
editor = "Baker, {Lionel R.}",
booktitle = "Specification and Measurement of Optical Systems",
address = "United States",

}

Meijer, J 1993, Sphericity and twist as functional parameters to represent surface geometries. in LR Baker (ed.), Specification and Measurement of Optical Systems. Proceedings of SPIE, vol. 1781, SPIE, Bellingham, WA, USA, pp. 131-138. https://doi.org/10.1117/12.141000

Sphericity and twist as functional parameters to represent surface geometries. / Meijer, J.

Specification and Measurement of Optical Systems. ed. / Lionel R. Baker. Bellingham, WA, USA : SPIE, 1993. p. 131-138 (Proceedings of SPIE; Vol. 1781).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Sphericity and twist as functional parameters to represent surface geometries

AU - Meijer, J.

PY - 1993/9/14

Y1 - 1993/9/14

N2 - Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.

AB - Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.

KW - METIS-144462

KW - IR-96142

U2 - 10.1117/12.141000

DO - 10.1117/12.141000

M3 - Conference contribution

SN - 9780819409607

T3 - Proceedings of SPIE

SP - 131

EP - 138

BT - Specification and Measurement of Optical Systems

A2 - Baker, Lionel R.

PB - SPIE

CY - Bellingham, WA, USA

ER -

Meijer J. Sphericity and twist as functional parameters to represent surface geometries. In Baker LR, editor, Specification and Measurement of Optical Systems. Bellingham, WA, USA: SPIE. 1993. p. 131-138. (Proceedings of SPIE). https://doi.org/10.1117/12.141000