Abstract
| Original language | English |
|---|---|
| Title of host publication | Specification and Measurement of Optical Systems |
| Editors | Lionel R. Baker |
| Place of Publication | Bellingham, WA, USA |
| Publisher | SPIE |
| Pages | 131-138 |
| ISBN (Print) | 9780819409607 |
| DOIs | |
| Publication status | Published - 14 Sep 1993 |
Publication series
| Name | Proceedings of SPIE |
|---|---|
| Publisher | SPIE |
| Volume | 1781 |
| ISSN (Print) | 0277-786X |
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Keywords
- METIS-144462
- IR-96142
Cite this
}
Sphericity and twist as functional parameters to represent surface geometries. / Meijer, J.
Specification and Measurement of Optical Systems. ed. / Lionel R. Baker. Bellingham, WA, USA : SPIE, 1993. p. 131-138 (Proceedings of SPIE; Vol. 1781).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
TY - GEN
T1 - Sphericity and twist as functional parameters to represent surface geometries
AU - Meijer, J.
PY - 1993/9/14
Y1 - 1993/9/14
N2 - Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.
AB - Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.
KW - METIS-144462
KW - IR-96142
U2 - 10.1117/12.141000
DO - 10.1117/12.141000
M3 - Conference contribution
SN - 9780819409607
T3 - Proceedings of SPIE
SP - 131
EP - 138
BT - Specification and Measurement of Optical Systems
A2 - Baker, Lionel R.
PB - SPIE
CY - Bellingham, WA, USA
ER -