@inproceedings{3313d482e94043619c563479b3563e31,
title = "Sphericity and twist as functional parameters to represent surface geometries",
abstract = "Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.",
keywords = "METIS-144462, IR-96142",
author = "J. Meijer",
year = "1993",
month = sep,
day = "14",
doi = "10.1117/12.141000",
language = "English",
isbn = "9780819409607",
series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "131--138",
editor = "Baker, {Lionel R.}",
booktitle = "Specification and Measurement of Optical Systems",
address = "United States",
}