Sphericity and twist as functional parameters to represent surface geometries

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Abstract

Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.
Original languageEnglish
Title of host publicationSpecification and Measurement of Optical Systems
EditorsLionel R. Baker
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages131-138
ISBN (Print)9780819409607
DOIs
Publication statusPublished - 14 Sep 1993

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume1781
ISSN (Print)0277-786X

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Keywords

  • METIS-144462
  • IR-96142

Cite this

Meijer, J. (1993). Sphericity and twist as functional parameters to represent surface geometries. In L. R. Baker (Ed.), Specification and Measurement of Optical Systems (pp. 131-138). (Proceedings of SPIE; Vol. 1781). Bellingham, WA, USA: SPIE. https://doi.org/10.1117/12.141000