Spin-On-Glass (SOG) materials and applications

Nhu Toan Nguyen, Duc Chien Nguyen, N. Nguyen thanh giang, J. Holleman, P.H. Woerlee, N. Vodjdani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 2nd International Workshop on Materials Science (IWOMS'95)
Place of Publication	Hanoi, Vietnam
Pages	191-194
Publication status	Published - 1 Oct 1995

Keywords

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title = "Spin-On-Glass (SOG) materials and applications",

keywords = "METIS-113835",

author = "Nguyen, {Nhu Toan} and Nguyen, {Duc Chien} and {Nguyen thanh giang}, N. and J. Holleman and P.H. Woerlee and N. Vodjdani",

year = "1995",

month = oct,

day = "1",

language = "Undefined",

pages = "191--194",

booktitle = "Proceedings of the 2nd International Workshop on Materials Science (IWOMS'95)",

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TY - GEN

T1 - Spin-On-Glass (SOG) materials and applications

AU - Nguyen, Nhu Toan

AU - Nguyen, Duc Chien

AU - Nguyen thanh giang, N.

AU - Holleman, J.

AU - Woerlee, P.H.

AU - Vodjdani, N.

PY - 1995/10/1

Y1 - 1995/10/1

KW - METIS-113835

M3 - Conference contribution

SP - 191

EP - 194

BT - Proceedings of the 2nd International Workshop on Materials Science (IWOMS'95)

CY - Hanoi, Vietnam

ER -