Spring-constant measurement methods for RF-MEMS capacitive switches

Jiahui Wang; Jeroen Bielen; Cora Salm; Jurriaan Schmitz

doi:10.1109/ICMTS.2016.7476164

Spring-constant measurement methods for RF-MEMS capacitive switches

Jiahui Wang, Jeroen Bielen, Cora Salm, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.

Original language	English
Title of host publication	2016 International Conference on Microelectronic Test Structures (ICMTS)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	10-14
Number of pages	5
ISBN (Electronic)	978-1-4673-8793-4, 978-1-4673-8792-7
ISBN (Print)	978-1-4673-8791-0
DOIs	https://doi.org/10.1109/ICMTS.2016.7476164
Publication status	Published - 28 Mar 2016
Event	29th International Conference on Microelectronic Test Structures, ICMTS 2016 - Mielparque Yokohama, Yokohama, Japan Duration: 28 Mar 2016 → 31 Mar 2016 Conference number: 29

Publication series

Name	International Conference on Microelectronic Test Structures (ICMTS)
Publisher	IEEE
Volume	2016
ISSN (Print)	1071-9032
ISSN (Electronic)	2158-1029

Conference

Conference	29th International Conference on Microelectronic Test Structures, ICMTS 2016
Abbreviated title	ICMTS
Country/Territory	Japan
City	Yokohama
Period	28/03/16 → 31/03/16

Keywords

MEMS switch
Resonance
Capacitance-voltage measurements
Spring constant

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10.1109/ICMTS.2016.7476164

Wang2016spring-constantAccepted author version, 721 KBLicence: Unspecified

Cite this

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title = "Spring-constant measurement methods for RF-MEMS capacitive switches",

abstract = "In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.",

keywords = "MEMS switch, Resonance, Capacitance-voltage measurements, Spring constant",

author = "Jiahui Wang and Jeroen Bielen and Cora Salm and Jurriaan Schmitz",

note = "10.1109/ICMTS.2016.7476164 ; 29th International Conference on Microelectronic Test Structures, ICMTS 2016, ICMTS ; Conference date: 28-03-2016 Through 31-03-2016",

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language = "English",

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Wang, J, Bielen, J, Salm, C & Schmitz, J 2016, Spring-constant measurement methods for RF-MEMS capacitive switches. in 2016 International Conference on Microelectronic Test Structures (ICMTS). International Conference on Microelectronic Test Structures (ICMTS), vol. 2016, IEEE, Piscataway, NJ, pp. 10-14, 29th International Conference on Microelectronic Test Structures, ICMTS 2016, Yokohama, Japan, 28/03/16. https://doi.org/10.1109/ICMTS.2016.7476164

Spring-constant measurement methods for RF-MEMS capacitive switches. / Wang, Jiahui; Bielen, Jeroen; Salm, Cora et al.

2016 International Conference on Microelectronic Test Structures (ICMTS). Piscataway, NJ : IEEE, 2016. p. 10-14 (International Conference on Microelectronic Test Structures (ICMTS); Vol. 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Spring-constant measurement methods for RF-MEMS capacitive switches

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AU - Bielen, Jeroen

AU - Salm, Cora

AU - Schmitz, Jurriaan

N1 - Conference code: 29

PY - 2016/3/28

Y1 - 2016/3/28

N2 - In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.

AB - In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.

KW - MEMS switch

KW - Resonance

KW - Capacitance-voltage measurements

KW - Spring constant

U2 - 10.1109/ICMTS.2016.7476164

DO - 10.1109/ICMTS.2016.7476164

M3 - Conference contribution

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BT - 2016 International Conference on Microelectronic Test Structures (ICMTS)

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Y2 - 28 March 2016 through 31 March 2016

ER -

Spring-constant measurement methods for RF-MEMS capacitive switches

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Keywords

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