Abstract
In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.
Original language | English |
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Title of host publication | 2016 International Conference on Microelectronic Test Structures (ICMTS) |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 10-14 |
Number of pages | 5 |
ISBN (Electronic) | 978-1-4673-8793-4, 978-1-4673-8792-7 |
ISBN (Print) | 978-1-4673-8791-0 |
DOIs | |
Publication status | Published - 28 Mar 2016 |
Event | 29th International Conference on Microelectronic Test Structures, ICMTS 2016 - Mielparque Yokohama, Yokohama, Japan Duration: 28 Mar 2016 → 31 Mar 2016 Conference number: 29 |
Publication series
Name | International Conference on Microelectronic Test Structures (ICMTS) |
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Publisher | IEEE |
Volume | 2016 |
ISSN (Print) | 1071-9032 |
ISSN (Electronic) | 2158-1029 |
Conference
Conference | 29th International Conference on Microelectronic Test Structures, ICMTS 2016 |
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Abbreviated title | ICMTS |
Country/Territory | Japan |
City | Yokohama |
Period | 28/03/16 → 31/03/16 |
Keywords
- MEMS switch
- Resonance
- Capacitance-voltage measurements
- Spring constant