Spring-constant measurement methods for RF-MEMS capacitive switches

Jiahui Wang, Jeroen Bielen, Cora Salm, Jurriaan Schmitz

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    Abstract

    In this article we compare three approaches to measure the spring constant in RF MEMS capacitive switches. We use the lowest vibration mode, as obtained from vibrometry; the pull-in voltage; and the low-field capacitance-voltage curve of the device to extract the spring constant. Experimental results are presented for each approach, and FEM model predictions are used to further verify and interpret the findings. Pros and cons of each method are discussed.
    Original languageEnglish
    Title of host publication2016 International Conference on Microelectronic Test Structures (ICMTS)
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages10-14
    Number of pages5
    ISBN (Electronic)978-1-4673-8793-4, 978-1-4673-8792-7
    ISBN (Print)978-1-4673-8791-0
    DOIs
    Publication statusPublished - 28 Mar 2016
    Event29th International Conference on Microelectronic Test Structures, ICMTS 2016 - Mielparque Yokohama, Yokohama, Japan
    Duration: 28 Mar 201631 Mar 2016
    Conference number: 29

    Publication series

    NameInternational Conference on Microelectronic Test Structures (ICMTS)
    PublisherIEEE
    Volume2016
    ISSN (Print)1071-9032
    ISSN (Electronic)2158-1029

    Conference

    Conference29th International Conference on Microelectronic Test Structures, ICMTS 2016
    Abbreviated titleICMTS
    CountryJapan
    CityYokohama
    Period28/03/1631/03/16

    Keywords

    • MEMS switch
    • Resonance
    • Capacitance-voltage measurements
    • Spring constant

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  • Cite this

    Wang, J., Bielen, J., Salm, C., & Schmitz, J. (2016). Spring-constant measurement methods for RF-MEMS capacitive switches. In 2016 International Conference on Microelectronic Test Structures (ICMTS) (pp. 10-14). (International Conference on Microelectronic Test Structures (ICMTS); Vol. 2016). Piscataway, NJ: IEEE. https://doi.org/10.1109/ICMTS.2016.7476164