Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.
|Publication status||Published - 18 Jun 2018|
|Event||E-MRS Spring Meeting 2018 - Strasbourg, France|
Duration: 18 Jun 2018 → 22 Jun 2018
|Conference||E-MRS Spring Meeting 2018|
|Period||18/06/18 → 22/06/18|