Sputter damage by low energy charged particle irradiation

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Abstract

Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.
Original languageEnglish
Publication statusPublished - 18 Jun 2018
EventE-MRS Spring Meeting 2018 - Strasbourg, France
Duration: 18 Jun 201822 Jun 2018
http://www.european-mrs.com/meetings/2018-spring-meeting

Conference

ConferenceE-MRS Spring Meeting 2018
CountryFrance
CityStrasbourg
Period18/06/1822/06/18
Internet address

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    Phadke, P., Sturm, M., van de Kruijs, R., & Bijkerk, F. (2018). Sputter damage by low energy charged particle irradiation. Poster session presented at E-MRS Spring Meeting 2018, Strasbourg, France.