Sputter damage by low energy charged particle irradiation

Research output: Contribution to conferencePosterAcademic

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Abstract

Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.
Original languageEnglish
Publication statusPublished - 18 Jun 2018
EventE-MRS Spring Meeting 2018 - Strasbourg, France
Duration: 18 Jun 201822 Jun 2018
http://www.european-mrs.com/meetings/2018-spring-meeting

Conference

ConferenceE-MRS Spring Meeting 2018
CountryFrance
CityStrasbourg
Period18/06/1822/06/18
Internet address

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quartz crystals
microbalances
charged particles
damage
metal crystals
irradiation
nitrogen ions
energetic particles
nitrides
implantation
ions
sputtering
thresholds
energy

Cite this

Phadke, P., Sturm, M., van de Kruijs, R., & Bijkerk, F. (2018). Sputter damage by low energy charged particle irradiation. Poster session presented at E-MRS Spring Meeting 2018, Strasbourg, France.
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title = "Sputter damage by low energy charged particle irradiation",
abstract = "Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.",
author = "Parikshit Phadke and Marko Sturm and {van de Kruijs}, Robbert and Fred Bijkerk",
year = "2018",
month = "6",
day = "18",
language = "English",
note = "E-MRS Spring Meeting 2018 ; Conference date: 18-06-2018 Through 22-06-2018",
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Phadke, P, Sturm, M, van de Kruijs, R & Bijkerk, F 2018, 'Sputter damage by low energy charged particle irradiation' E-MRS Spring Meeting 2018, Strasbourg, France, 18/06/18 - 22/06/18, .

Sputter damage by low energy charged particle irradiation. / Phadke, Parikshit ; Sturm, Marko; van de Kruijs, Robbert; Bijkerk, Fred.

2018. Poster session presented at E-MRS Spring Meeting 2018, Strasbourg, France.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Sputter damage by low energy charged particle irradiation

AU - Phadke, Parikshit

AU - Sturm, Marko

AU - van de Kruijs, Robbert

AU - Bijkerk, Fred

PY - 2018/6/18

Y1 - 2018/6/18

N2 - Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.

AB - Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.

M3 - Poster

ER -

Phadke P, Sturm M, van de Kruijs R, Bijkerk F. Sputter damage by low energy charged particle irradiation. 2018. Poster session presented at E-MRS Spring Meeting 2018, Strasbourg, France.