Sputter damage by low energy charged particle irradiation

Parikshit  Phadke; Marko Sturm; Robbert van de Kruijs; Fred Bijkerk

Sputter damage by low energy charged particle irradiation

Parikshit Phadke, Marko Sturm, Robbert van de Kruijs, Fred Bijkerk

XUV Optics

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Abstract

Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.

Original language	English
Publication status	Published - 18 Jun 2018
Event	E-MRS Spring Meeting 2018 - Strasbourg, France Duration: 18 Jun 2018 → 22 Jun 2018 http://www.european-mrs.com/meetings/2018-spring-meeting

Conference

Conference	E-MRS Spring Meeting 2018
Country/Territory	France
City	Strasbourg
Period	18/06/18 → 22/06/18
Internet address	http://www.european-mrs.com/meetings/2018-spring-meeting

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title = "Sputter damage by low energy charged particle irradiation",

abstract = "Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.",

author = "Parikshit Phadke and Marko Sturm and {van de Kruijs}, Robbert and Fred Bijkerk",

year = "2018",

month = jun,

day = "18",

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note = "E-MRS Spring Meeting 2018 ; Conference date: 18-06-2018 Through 22-06-2018",

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T1 - Sputter damage by low energy charged particle irradiation

AU - Phadke, Parikshit

AU - Sturm, Marko

AU - van de Kruijs, Robbert

AU - Bijkerk, Fred

PY - 2018/6/18

Y1 - 2018/6/18

N2 - Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.

AB - Energetic particles above sputter threshold are capable of inducing damage either by recoil generation or through compound formation. This is studied as a basis for future work by irradiation of a metal coated quartz crystal microbalance (QCM) to At+ ions and a mixture of N+/N2+ ions. Frequency changes of QCM were used to measure the thickness loss or gain for sputtering or compound formation induced implantation respectively. Nitrogen ions were found to implant resulting in a nitride.

M3 - Poster

T2 - E-MRS Spring Meeting 2018

Y2 - 18 June 2018 through 22 June 2018

ER -

Sputter damage by low energy charged particle irradiation

Abstract

Conference

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