Sputter deposition for optical quality oxide layers

Martijn Stok, C.I. van Emmerik (Contributor), W.A.P.M. Hendriks (Contributor), Ivo Hegeman (Contributor), M. Dijkstra (Contributor), S.M. García Blanco (Contributor)

Research output: Contribution to conference › Poster › Professional

Original language	English
Publication status	Published - 2019
Event	MESA+ user meeting 2019 - University of Twente, Enschede, Netherlands Duration: 19 Apr 2019 → 19 Apr 2019

Cite this

@conference{8fd3e78117ea4f45bd797f1e08d3275a,

title = "Sputter deposition for optical quality oxide layers",

author = "Martijn Stok and {van Emmerik}, C.I. and W.A.P.M. Hendriks and Ivo Hegeman and M. Dijkstra and {Garc{\'i}a Blanco}, S.M.",

year = "2019",

language = "English",

note = "MESA+ user meeting 2019 ; Conference date: 19-04-2019 Through 19-04-2019",

}