Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental industrial environment

Engineering

• High Sensitivity 100%
• Silicon 100%
• Stability 100%
• Industrial Environment 100%
• Boron 100%
• Radiation 50%
• Minor Change 50%
• Shallow Junction 50%
• Performance 50%
• Photodetector 50%
• Extreme-Ultraviolet Lithography 50%
• Cleaning 50%
• Applications 50%
• Measurement 50%
• Surface Cleaning 50%
• Characteristics 50%
• Surfaces 50%
• Payload 50%
• Industrial Applications 50%

Physics

• Boron 100%
• Stability 100%
• Environment 100%
• Diode 100%
• Utilization 100%
• Silicon 100%
• Hydrogen 50%
• Lithography 50%
• Cleaning 50%
• Performance 50%
• Technology 50%
• Photometer 50%
• Extreme Ultraviolet Radiation 50%
• Synchrotron 50%