Stability of a 1-kW excimer laser with long optical pulses

J.C.M. Timmermans, T. Hofmann, Th. Hofmann, F.A. van Goor, W.J. Witteman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance. The parameters that influence the stability of the discharge are discussed. With the proper settings 1 kW of average power can be reached.
Original languageEnglish
Title of host publicationXI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser
PublisherSPIE
Pages165-168
DOIs
Publication statusPublished - 27 Aug 1996

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume3092
ISSN (Print)0277-786X

Fingerprint

excimer lasers
gas dynamics
pulses
deterioration
gas mixtures
repetition
contamination
lasers

Keywords

  • IR-96096
  • METIS-131448

Cite this

Timmermans, J. C. M., Hofmann, T., Hofmann, T., van Goor, F. A., & Witteman, W. J. (1996). Stability of a 1-kW excimer laser with long optical pulses. In XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser (pp. 165-168). (Proceedings of SPIE; Vol. 3092). SPIE. https://doi.org/10.1117/12.270207
Timmermans, J.C.M. ; Hofmann, T. ; Hofmann, Th. ; van Goor, F.A. ; Witteman, W.J. / Stability of a 1-kW excimer laser with long optical pulses. XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. SPIE, 1996. pp. 165-168 (Proceedings of SPIE).
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abstract = "For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance. The parameters that influence the stability of the discharge are discussed. With the proper settings 1 kW of average power can be reached.",
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Timmermans, JCM, Hofmann, T, Hofmann, T, van Goor, FA & Witteman, WJ 1996, Stability of a 1-kW excimer laser with long optical pulses. in XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. Proceedings of SPIE, vol. 3092, SPIE, pp. 165-168. https://doi.org/10.1117/12.270207

Stability of a 1-kW excimer laser with long optical pulses. / Timmermans, J.C.M.; Hofmann, T.; Hofmann, Th.; van Goor, F.A.; Witteman, W.J.

XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. SPIE, 1996. p. 165-168 (Proceedings of SPIE; Vol. 3092).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Timmermans JCM, Hofmann T, Hofmann T, van Goor FA, Witteman WJ. Stability of a 1-kW excimer laser with long optical pulses. In XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. SPIE. 1996. p. 165-168. (Proceedings of SPIE). https://doi.org/10.1117/12.270207