For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance. The parameters that influence the stability of the discharge are discussed. With the proper settings 1 kW of average power can be reached.
|Name||Proceedings of SPIE|
|Conference||XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Edinburgh, United Kingdom|
|Period||27/08/96 → …|