Stability of EUV caps under reactive environments (Secure-N)

T. Zaharia, Michael Gleeson, W. van Schaik, M. van Kampen, Christopher James Lee, Frederik Bijkerk, Aart Kleijn

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 10 Dec 2012

Keywords

  • METIS-298904

Cite this

Zaharia, T., Gleeson, M., van Schaik, W., van Kampen, M., Lee, C. J., Bijkerk, F., & Kleijn, A. (2012). Stability of EUV caps under reactive environments (Secure-N). -.
Zaharia, T. ; Gleeson, Michael ; van Schaik, W. ; van Kampen, M. ; Lee, Christopher James ; Bijkerk, Frederik ; Kleijn, Aart. / Stability of EUV caps under reactive environments (Secure-N).
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Zaharia, T, Gleeson, M, van Schaik, W, van Kampen, M, Lee, CJ, Bijkerk, F & Kleijn, A 2012, 'Stability of EUV caps under reactive environments (Secure-N)' pp. -.

Stability of EUV caps under reactive environments (Secure-N). / Zaharia, T.; Gleeson, Michael; van Schaik, W.; van Kampen, M.; Lee, Christopher James; Bijkerk, Frederik; Kleijn, Aart.

2012. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Stability of EUV caps under reactive environments (Secure-N)

AU - Zaharia, T.

AU - Gleeson, Michael

AU - van Schaik, W.

AU - van Kampen, M.

AU - Lee, Christopher James

AU - Bijkerk, Frederik

AU - Kleijn, Aart

PY - 2012/12/10

Y1 - 2012/12/10

KW - METIS-298904

M3 - Poster

SP - -

ER -

Zaharia T, Gleeson M, van Schaik W, van Kampen M, Lee CJ, Bijkerk F et al. Stability of EUV caps under reactive environments (Secure-N). 2012.