@conference{51ee29ae15bc414984ef2ac95090c9fb,
title = "Stability of EUV caps under reactive environments (Secure-N)",
keywords = "METIS-298904",
author = "T. Zaharia and Michael Gleeson and {van Schaik}, W. and {van Kampen}, M. and Lee, {Christopher James} and Frederik Bijkerk and Aart Kleijn",
year = "2012",
month = dec,
day = "10",
language = "English",
pages = "--",
note = "M2i Annual Meeting 2012 : Tertiary Stability of EUV caps under reactive environments (Secure-N) ; Conference date: 10-12-2012",
}