Stability of low refractive index PECVD silicon oxynitride layers

M.G. Hussein, Kerstin Worhoff, G. Sengo, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings 8th Annual Sympsium IEEE/LEOS Benelux Chapter
    EditorsR.M de Ridder, G Altena, D.H. Geuzebroek, R Dekker
    Place of PublicationEnschede, The Netherlands
    PublisherIEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems
    Pages77-80
    Number of pages4
    ISBN (Print)90-365-1990-X
    Publication statusPublished - 20 Nov 2003
    Event8th Annual Symposium IEEE/LEOS Benelux Chapter organized by University of Twente, Integrated Optical MicroSystem: Proceedings 8th Annual Sympsium IEEE/LEOS Benelux Chapter - Enschede, The Netherlands
    Duration: 20 Nov 200321 Nov 2003

    Conference

    Conference8th Annual Symposium IEEE/LEOS Benelux Chapter organized by University of Twente, Integrated Optical MicroSystem
    CityEnschede, The Netherlands
    Period20/11/0321/11/03

    Keywords

    • METIS-214400

    Cite this