Stability of thin platinum films implemented in high-temperature microdevices

Roald M. Tiggelaar; Remco G.P. Sanders; A.W. Groenland; Johannes G.E. Gardeniers

doi:10.1016/j.sna.2009.03.017

Stability of thin platinum films implemented in high-temperature microdevices

Roald M. Tiggelaar, Remco G.P. Sanders, A.W. Groenland, Johannes G.E. Gardeniers

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this paper we report on structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400–950 ◦C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffraction, electrical measurements, and optical microscope images of film sintering after annealing at high temperature. A method to obtain highly adhesive, patterned Pt films without adhesion layer is presented, which films show the highest reliability, in terms of structural integrity and electrical properties. Therefore this is the best option for implementation in high-temperature microdevices like microreactors and gas sensors operating at temperatures above 750 ◦C.

Original language	English
Pages (from-to)	39-47
Number of pages	9
Journal	Sensors and Actuators A: Physical
Volume	152
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2009.03.017
Publication status	Published - 21 May 2009

Keywords

METIS-263840
EWI-15337
SC-ICS: Integrated Chemical Sensors
IR-62804

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10.1016/j.sna.2009.03.017

http://eprints.eemcs.utwente.nl/secure2/15337/01/groenland_phys.pdf

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title = "Stability of thin platinum films implemented in high-temperature microdevices",

abstract = "In this paper we report on structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400–950 ◦C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffraction, electrical measurements, and optical microscope images of film sintering after annealing at high temperature. A method to obtain highly adhesive, patterned Pt films without adhesion layer is presented, which films show the highest reliability, in terms of structural integrity and electrical properties. Therefore this is the best option for implementation in high-temperature microdevices like microreactors and gas sensors operating at temperatures above 750 ◦C.",

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AU - Gardeniers, Johannes G.E.

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AB - In this paper we report on structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400–950 ◦C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffraction, electrical measurements, and optical microscope images of film sintering after annealing at high temperature. A method to obtain highly adhesive, patterned Pt films without adhesion layer is presented, which films show the highest reliability, in terms of structural integrity and electrical properties. Therefore this is the best option for implementation in high-temperature microdevices like microreactors and gas sensors operating at temperatures above 750 ◦C.

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KW - SC-ICS: Integrated Chemical Sensors

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JO - Sensors and Actuators A: Physical

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Stability of thin platinum films implemented in high-temperature microdevices

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Keywords

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