Stamps for submicrometer soft lithography fabricated by capillary force lithography

C.M. Bruinink, M. Péter, Meint J. de Boer, L. Kuipers, Jurriaan Huskens, David Reinhoudt

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)
25 Downloads (Pure)

Abstract

Lithography, capillary force • Lithography, soft • Replica molding • Stamps 
Original languageUndefined
Pages (from-to)1086-1090
Number of pages5
JournalAdvanced materials
Volume16
Issue number13
DOIs
Publication statusPublished - 21 Jul 2004

Keywords

  • METIS-226529
  • IR-53587
  • EWI-10412

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