State of the art in microfabrication

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    Abstract

    In this review paper the state of the art in microfabrication is presented. The focus is on trends in integrated circuit fabrication by mainstream industrial players. The article starts with Moore’s Law, describing its inception as well as the evolution of Moore’s metric of the number of components per chip until today. Then, the main trends in manufacturing and in contemporary research are sketched, for CMOS integrated circuits, memory chips, and other planar technologies. The field is rapidly expanding beyond silicon for future microelectronic devices, fired by market demands in various fields such as LED lighting, photovoltaic systems and power electronics. Emerging semiconductor materials are reviewed in the perspective of radiation detection potential in the final section.
    Original languageUndefined
    Pages1-10
    Number of pages10
    Publication statusPublished - 2 Jun 2014
    Event3rd International Conference on Technology and Instrumentation in Particle Physics 2014 - Beurs van Berlage, Amsterdam, Netherlands
    Duration: 2 Jun 20146 Jun 2014
    Conference number: 3
    https://indico.cern.ch/event/192695/

    Conference

    Conference3rd International Conference on Technology and Instrumentation in Particle Physics 2014
    Abbreviated titleTIPP 2014
    CountryNetherlands
    CityAmsterdam
    Period2/06/146/06/14
    Internet address

    Keywords

    • EWI-25837
    • IR-103619

    Cite this

    Schmitz, J. (2014). State of the art in microfabrication. 1-10. Paper presented at 3rd International Conference on Technology and Instrumentation in Particle Physics 2014, Amsterdam, Netherlands.