State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes

R.B.R. van Silfhout, Y. Li, W.D. van Driel, J.H.J. Janssen, J. Bisschop, F. Kuper, R.L. Schravendeel, G.Q. Zhang, R. van der Weerd, M. Jansen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of International Conference EurosimE 2001
    Pages277-289
    Publication statusPublished - 9 Apr 2001
    EventParis (France): Proceedings of International Conference EurosimE 2001 -
    Duration: 9 Apr 200111 Apr 2001

    Conference

    ConferenceParis (France)
    Period9/04/0111/04/01

    Keywords

    • METIS-203737

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