@inproceedings{541f74009dd44acdb209eeeb03c9b190,
title = "State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes",
keywords = "METIS-203737",
author = "{van Silfhout}, R.B.R. and Y. Li and {van Driel}, W.D. and J.H.J. Janssen and J. Bisschop and F. Kuper and R.L. Schravendeel and G.Q. Zhang and {van der Weerd}, R. and M. Jansen",
year = "2001",
month = apr,
day = "9",
language = "Undefined",
isbn = "0-7803-9806-8",
pages = "277--289",
booktitle = "Proceedings of International Conference EurosimE 2001",
note = "null ; Conference date: 09-04-2001 Through 11-04-2001",
}