State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes

R.B.R. van Silfhout; Y. Li; W.D. van Driel; J.H.J. Janssen; J. Bisschop; F. Kuper; R.L. Schravendeel; G.Q. Zhang; R. van der Weerd; M. Jansen

State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes

R.B.R. van Silfhout, Y. Li, W.D. van Driel, J.H.J. Janssen, J. Bisschop, F. Kuper, R.L. Schravendeel, G.Q. Zhang, R. van der Weerd, M. Jansen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of International Conference EurosimE 2001
Pages	277-289
Publication status	Published - 9 Apr 2001
Event	Paris (France): Proceedings of International Conference EurosimE 2001 - Duration: 9 Apr 2001 → 11 Apr 2001

Conference

Conference	Paris (France)
Period	9/04/01 → 11/04/01

Keywords

METIS-203737

Cite this

@inproceedings{541f74009dd44acdb209eeeb03c9b190,

title = "State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes",

keywords = "METIS-203737",

author = "{van Silfhout}, R.B.R. and Y. Li and {van Driel}, W.D. and J.H.J. Janssen and J. Bisschop and F. Kuper and R.L. Schravendeel and G.Q. Zhang and {van der Weerd}, R. and M. Jansen",

year = "2001",

month = apr,

day = "9",

language = "Undefined",

isbn = "0-7803-9806-8",

pages = "277--289",

booktitle = "Proceedings of International Conference EurosimE 2001",

note = "null ; Conference date: 09-04-2001 Through 11-04-2001",

}

State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes. / van Silfhout, R.B.R.; Li, Y.; van Driel, W.D.; Janssen, J.H.J.; Bisschop, J.; Kuper, F.; Schravendeel, R.L.; Zhang, G.Q.; van der Weerd, R.; Jansen, M.

Proceedings of International Conference EurosimE 2001. 2001. p. 277-289.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes

AU - van Silfhout, R.B.R.

AU - Li, Y.

AU - van Driel, W.D.

AU - Janssen, J.H.J.

AU - Bisschop, J.

AU - Kuper, F.

AU - Schravendeel, R.L.

AU - Zhang, G.Q.

AU - van der Weerd, R.

AU - Jansen, M.

PY - 2001/4/9

Y1 - 2001/4/9

KW - METIS-203737

M3 - Conference contribution

SN - 0-7803-9806-8

SP - 277

EP - 289

BT - Proceedings of International Conference EurosimE 2001

Y2 - 9 April 2001 through 11 April 2001

ER -