Abstract
This paper deals with the theory of an air-gap capacitor used as a micromechanical resonator. Both static and dynamic aspects are discussed. A single-element approach for the electrostatic excitation and capacitive detection of the vibrational motion of the resonators is described. The non-linear character of the electrostatic force is accounted for in the static analysis. The behaviour of the air-gap capacitor is modelled as a lumped spring-mass system and its limitations are discussed. Also an equivalent electrical one-port network is derived, which can be used in a circuit simulation to account for the mechanical behaviour of the resonator. The results obtained from the spring-mass system are compared with the results obtained from a more elaborate numerical analysis of the air-gap capacitor. The lumped spring-mass system is adequate for modelling the air-gap capacitor.
Original language | English |
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Pages (from-to) | 121-128 |
Number of pages | 8 |
Journal | Sensors and actuators. A: Physical |
Volume | 35 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1992 |