Static and dynamic properties of active joints

Michael Curt Elwenspoek, M. Weustink, R. Legtenberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
    84 Downloads (Pure)

    Abstract

    In this paper the realisation and the first experimental results of a new electrostatic actuator, the 'active joint' are presented. This structure is capable of delivering large forces and large deflections. When a sinusoidal voltage is applied with an amplitude larger than the critical voltage and a frequency close to the resonant frequency, the active joints shows a chaotic response. A first model is presented in order to describe the dynamic behaviour of active joints.
    Original languageEnglish
    Title of host publicationProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages412-415
    Number of pages4
    ISBN (Print)91-630-3473-5
    Publication statusPublished - 25 Jun 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Publication series

    Name
    Volume2

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

    Keywords

    • EWI-13606
    • IR-17241
    • METIS-114136

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