Static friction in elastic adhesive MEMS contacts, models and experiment

Niels Roelof Tas, C. Gui, Michael Curt Elwenspoek

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    15 Citations (Scopus)
    65 Downloads (Pure)

    Abstract

    Static friction in shearing mode can be expressed as the product of the shear strength of the interface and the real contact area. The influence of roughness on friction in elastic adhesive contact is analyzed. Special attention is paid to low loading conditions, in which the number of contact points is small. The models are used to analyze a friction experiment in a MEMS friction meter.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages193-198
    Number of pages6
    ISBN (Print)0-7803-5273-4
    DOIs
    Publication statusPublished - 23 Jan 2000
    Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
    Duration: 23 Jan 200027 Jan 2000
    Conference number: 13

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
    Abbreviated titleMEMS
    CountryJapan
    CityMiyazaki
    Period23/01/0027/01/00

    Keywords

    • METIS-113068
    • EWI-13186
    • IR-16183

    Cite this

    Tas, N. R., Gui, C., & Elwenspoek, M. C. (2000). Static friction in elastic adhesive MEMS contacts, models and experiment. In Proceedings of the IEEE Micro Electro Mechanical Systems (pp. 193-198). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2000.838515