Stationary hillocks on etching silicon

Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Micromechanics Europe 1998 Conference (MME)
Place of Publication	Ulvik, Norway
Pages	70-73
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country/Territory	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

Keywords

@inproceedings{54101f2386d74aca9315f6c9d6f029ad,

title = "Stationary hillocks on etching silicon",

keywords = "METIS-112905, IR-16023",

author = "Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "3",

language = "Undefined",

pages = "70--73",

booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

note = "9th Micromechanics Europe Workshop, MME 1998 ; Conference date: 03-06-1998 Through 05-06-1998",

}

TY - GEN

T1 - Stationary hillocks on etching silicon

AU - Elwenspoek, Michael Curt

N1 - Conference code: 9

PY - 1998/6/3

Y1 - 1998/6/3

KW - METIS-112905

KW - IR-16023

M3 - Conference contribution

SP - 70

EP - 73

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

T2 - 9th Micromechanics Europe Workshop, MME 1998

Y2 - 3 June 1998 through 5 June 1998

ER -