Stationary hillocks on etching silicon

Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
    Place of PublicationUlvik, Norway
    Pages70-73
    Publication statusPublished - 3 Jun 1998
    Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
    Duration: 3 Jun 19985 Jun 1998
    Conference number: 9

    Conference

    Conference9th Micromechanics Europe Workshop, MME 1998
    Abbreviated titleMME
    CountryNorway
    CityUlvik
    Period3/06/985/06/98

    Keywords

    • METIS-112905
    • IR-16023

    Cite this

    Elwenspoek, M. C. (1998). Stationary hillocks on etching silicon. In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 70-73). Ulvik, Norway.