Stationary hillocks on etching silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
Place of PublicationUlvik, Norway
Pages70-73
Publication statusPublished - 3 Jun 1998
Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
Duration: 3 Jun 19985 Jun 1998
Conference number: 9

Conference

Conference9th Micromechanics Europe Workshop, MME 1998
Abbreviated titleMME
CountryNorway
CityUlvik
Period3/06/985/06/98

Keywords

  • METIS-112905
  • IR-16023

Cite this

Elwenspoek, M. C. (1998). Stationary hillocks on etching silicon. In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 70-73). Ulvik, Norway.
Elwenspoek, Michael Curt. / Stationary hillocks on etching silicon. Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. pp. 70-73
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author = "Elwenspoek, {Michael Curt}",
year = "1998",
month = "6",
day = "3",
language = "Undefined",
pages = "70--73",
booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

}

Elwenspoek, MC 1998, Stationary hillocks on etching silicon. in Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, pp. 70-73, 9th Micromechanics Europe Workshop, MME 1998, Ulvik, Norway, 3/06/98.

Stationary hillocks on etching silicon. / Elwenspoek, Michael Curt.

Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. p. 70-73.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Stationary hillocks on etching silicon

AU - Elwenspoek, Michael Curt

PY - 1998/6/3

Y1 - 1998/6/3

KW - METIS-112905

KW - IR-16023

M3 - Conference contribution

SP - 70

EP - 73

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

ER -

Elwenspoek MC. Stationary hillocks on etching silicon. In Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway. 1998. p. 70-73