| Original language | English |
|---|---|
| Place of Publication | Maui, Hawaii |
| Publication status | Published - 2011 |
Keywords
- METIS-304966
Status of multilayer coatings for EUV Lithography
Y. Platonov, J. Rodriquez, M. Kriese, Eric Louis, T. Feigl, S. Yulin
Research output: Other contribution › Other research output