| Original language | English |
|---|---|
| Place of Publication | Maui, Hawaii |
| Publication status | Published - 2011 |
Keywords
- METIS-304966
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Status of multilayer coatings for EUV Lithography
- Y. Platonov
- , J. Rodriquez
- , M. Kriese
- , Eric Louis
- , T. Feigl
- , S. Yulin
Research output: Other contribution › Other research output