TY - GEN
T1 - Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker
AU - Patrascu, M.
AU - Stramigioli, Stefano
N1 - 10.1109/ICMENS.2005.112
PY - 2005
Y1 - 2005
N2 - This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.
AB - This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.
KW - CE-Advanced Robotics
KW - METIS-248168
KW - EWI-12688
KW - IR-55794
U2 - 10.1109/ICMENS.2005.112
DO - 10.1109/ICMENS.2005.112
M3 - Conference contribution
SN - 0-7695-2398-6
SP - 81
EP - 86
BT - MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
PB - IEEE
Y2 - 24 July 2005 through 27 July 2005
ER -