This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.
|Title of host publication||MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on|
|Number of pages||6|
|Publication status||Published - 2005|
- CE-Advanced Robotics