Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker

M. Patrascu, Stefano Stramigioli

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    This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.
    Original languageUndefined
    Title of host publicationMEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
    Number of pages6
    ISBN (Print)0-7695-2398-6
    Publication statusPublished - 2005

    Publication series



    • CE-Advanced Robotics
    • METIS-248168
    • EWI-12688
    • IR-55794

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