Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker

M. Patrascu; Stefano Stramigioli

doi:10.1109/ICMENS.2005.112

Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker

M. Patrascu, Stefano Stramigioli

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

95 Downloads (Pure)

Abstract

This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.

Original language	Undefined
Title of host publication	MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Publisher	IEEE
Pages	81-86
Number of pages	6
ISBN (Print)	0-7695-2398-6
DOIs	https://doi.org/10.1109/ICMENS.2005.112
Publication status	Published - 2005
Event	2005 International Conference on MEMS, NANO and Smart Systems,: MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on - Duration: 24 Jul 2005 → 27 Jul 2005

Publication series

Name
Publisher	IEEE
Number	1

Conference

Conference	2005 International Conference on MEMS, NANO and Smart Systems,
Period	24/07/05 → 27/07/05
Other	24-27 July 2005

Keywords

CE-Advanced Robotics
METIS-248168
EWI-12688
IR-55794

Access to Document

10.1109/ICMENS.2005.112

01540781

Cite this

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title = "Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker",

abstract = "This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.",

keywords = "CE-Advanced Robotics, METIS-248168, EWI-12688, IR-55794",

author = "M. Patrascu and Stefano Stramigioli",

note = "10.1109/ICMENS.2005.112 ; null ; Conference date: 24-07-2005 Through 27-07-2005",

year = "2005",

doi = "10.1109/ICMENS.2005.112",

language = "Undefined",

isbn = "0-7695-2398-6",

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T1 - Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker

AU - Patrascu, M.

AU - Stramigioli, Stefano

N1 - 10.1109/ICMENS.2005.112

PY - 2005

Y1 - 2005

N2 - This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.

AB - This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.

KW - CE-Advanced Robotics

KW - METIS-248168

KW - EWI-12688

KW - IR-55794

U2 - 10.1109/ICMENS.2005.112

DO - 10.1109/ICMENS.2005.112

M3 - Conference contribution

SN - 0-7695-2398-6

SP - 81

EP - 86

BT - MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

PB - IEEE

Y2 - 24 July 2005 through 27 July 2005

ER -