@inproceedings{39efa1cfa1ef4feea248bb069b9dd68e,
title = "Stick-slip actuation of electrostatic stepper micropositioners for data storage-the µWalker",
abstract = "This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.",
keywords = "CE-Advanced Robotics, METIS-248168, EWI-12688, IR-55794",
author = "M. Patrascu and Stefano Stramigioli",
note = "10.1109/ICMENS.2005.112 ",
year = "2005",
doi = "10.1109/ICMENS.2005.112",
language = "Undefined",
isbn = "0-7695-2398-6",
publisher = "IEEE",
number = "1",
pages = "81--86",
booktitle = "MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on",
address = "United States",
}