Stiction of Surface Micromachined Structures after Rinsing and Drying: Model and Investigation of Adhesion Mechanisms

R. Legtenberg, J. Elders, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 17 Jun 1993

    Keywords

    • METIS-117974

    Cite this

    Legtenberg, R., Elders, J., & Elwenspoek, M. C. (1993, Jun 17). Stiction of Surface Micromachined Structures after Rinsing and Drying: Model and Investigation of Adhesion Mechanisms. Dish Hotel, Enschede.