Stiction of Surface Micromachined Structures after Rinsing and Drying: Model and Investigation of Adhesion Mechanisms

R. Legtenberg, J. Elders, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{ebbda75c7164470aac1f227aae8f143d,

title = "Stiction of Surface Micromachined Structures after Rinsing and Drying: Model and Investigation of Adhesion Mechanisms",

keywords = "METIS-117974",

author = "R. Legtenberg and J. Elders and Elwenspoek, {Michael Curt}",

year = "1993",

month = jun,

day = "17",

language = "Undefined",

type = "Other",

}