Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, H.A.C. Tilmans, J. Elders, Michael Curt Elwenspoek

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    Abstract

    The mechanisms causing stiction of polysilicon structures fabricated by surface micromachining techniques have been investigated. It is found that during drying from rinse liquids attractive dynamic capillary forces are responsible for bringing micromechanical structures into contact with the underlying substrate. Measured adhesion energies of sticking microbridges indicate that van der Waals forces are responsible for the stiction of hydrophobic surfaces and that hydrogen bridging is an additional adhesion mechanism for hydrophilic surfaces. Methods to reduce the stiction problem are indicated.
    Original languageEnglish
    Pages (from-to)230-238
    Number of pages9
    JournalSensors and actuators. A: Physical
    Volume1994
    Issue number43
    DOIs
    Publication statusPublished - May 1994

    Keywords

    • METIS-111590
    • IR-14407
    • EWI-14053

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